Characterization of TiCN coatings deposited by magnetron sputter-ion plating process: RBSandGDOS complementary analyses
Gespeichert in:
| Autor*in: |
Freire Jr, F.L. [verfasserIn] |
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| Format: |
Artikel |
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| Erschienen: |
1998 |
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| Systematik: |
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| Umfang: |
5 |
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| Übergeordnetes Werk: |
Enthalten in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms - Amsterdam [u.a.] : Elsevier, 1984, 136(1998), 1, Seite 788-792 |
|---|---|
| Übergeordnetes Werk: |
volume:136 ; year:1998 ; number:1 ; pages:788-792 ; extent:5 |
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