Spectroscopic diagnostics and modelling of silane microwave plasmas

Gespeichert in:

Autor*in:	Fantz, U. [verfasserIn]

Format:	Artikel

Erschienen:	1998

Umfang:	22

Übergeordnetes Werk:	Enthalten in: Plasma physics and controlled fusion - Bristol [u.a.] : Pergamon Press, 1984, 40(1998), 6, Seite 1035-1056
Übergeordnetes Werk:	volume:40 ; year:1998 ; number:6 ; pages:1035-1056 ; extent:22

Katalog-ID:	OLC1537042629

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