The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor

Gespeichert in:

Autor*in:	Andrieux, M. [verfasserIn] Badie, J.M. Ducarroir, M. Bisch, C.

Format:	Artikel

Erschienen:	1998

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Journal of physics. D, Applied physics - Bristol : IOP Publ., 1970, 31(1998), 12, Seite 1457-1464
Übergeordnetes Werk:	volume:31 ; year:1998 ; number:12 ; pages:1457-1464 ; extent:8

Katalog-ID:	OLC1537131834

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The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor

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