Attests of thermal annealing on the ultraviolet stability of a-SiC:H thin films deposited from liquid organosilanes

Gespeichert in:

Autor*in:	Seekamp, J. [verfasserIn] Bauhofer, W.

Format:	Artikel

Erschienen:	1998

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Journal of non-crystalline solids - Amsterdam : North-Holland Publ. Co., 1968, 227(1998), B, Seite 474-477
Übergeordnetes Werk:	volume:227 ; year:1998 ; supplement:B ; pages:474-477 ; extent:4

Katalog-ID:	OLC1537146211

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Attests of thermal annealing on the ultraviolet stability of a-SiC:H thin films deposited from liquid organosilanes

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