Attests of thermal annealing on the ultraviolet stability of a-SiC:H thin films deposited from liquid organosilanes
Autor*in: |
Seekamp, J. [verfasserIn] |
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Format: |
Artikel |
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Erschienen: |
1998 |
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Umfang: |
4 |
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Übergeordnetes Werk: |
Enthalten in: Journal of non-crystalline solids - Amsterdam : North-Holland Publ. Co., 1968, 227(1998), B, Seite 474-477 |
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Übergeordnetes Werk: |
volume:227 ; year:1998 ; supplement:B ; pages:474-477 ; extent:4 |
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