Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes

Gespeichert in:

Autor*in:	Wayne, David M. [verfasserIn] Schulze, Roland K. Maggiore, Carl Cooke, D.Wayne Havrilla, George

Format:	Artikel

Erschienen:	1999

Systematik:	VA 2367

Umfang:	12

Übergeordnetes Werk:	Enthalten in: Applied spectroscopy - Frederick, Md. : Soc., 1952, 53(1999), 3, Seite 266-277
Übergeordnetes Werk:	volume:53 ; year:1999 ; number:3 ; pages:266-277 ; extent:12

Katalog-ID:	OLC1551549751

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Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes

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