Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes
Autor*in: |
Wayne, David M. [verfasserIn] |
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Format: |
Artikel |
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Erschienen: |
1999 |
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Systematik: |
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Umfang: |
12 |
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Übergeordnetes Werk: |
Enthalten in: Applied spectroscopy - Frederick, Md. : Soc., 1952, 53(1999), 3, Seite 266-277 |
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Übergeordnetes Werk: |
volume:53 ; year:1999 ; number:3 ; pages:266-277 ; extent:12 |
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SW990412 (DE-627)OLC1551549751 (DE-599)GBVOLC1551549751 DE-627 ger DE-627 rakwb 530 610 VA 2367 AVZ rvk 33.07 bkl 35.25 bkl 33.18 bkl Wayne, David M. verfasserin aut Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes 1999 12 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Schulze, Roland K. oth Maggiore, Carl oth Cooke, D.Wayne oth Havrilla, George oth Enthalten in Applied spectroscopy Frederick, Md. : Soc., 1952 53(1999), 3, Seite 266-277 (DE-627)129482595 (DE-600)204667-2 (DE-576)014865971 0003-7028 nnns volume:53 year:1999 number:3 pages:266-277 extent:12 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_55 GBV_ILN_59 GBV_ILN_70 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4027 GBV_ILN_4116 GBV_ILN_4125 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 VA 2367 33.07 AVZ 35.25 AVZ 33.18 AVZ AR 53 1999 3 266-277 12 |
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SW990412 (DE-627)OLC1551549751 (DE-599)GBVOLC1551549751 DE-627 ger DE-627 rakwb 530 610 VA 2367 AVZ rvk 33.07 bkl 35.25 bkl 33.18 bkl Wayne, David M. verfasserin aut Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes 1999 12 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Schulze, Roland K. oth Maggiore, Carl oth Cooke, D.Wayne oth Havrilla, George oth Enthalten in Applied spectroscopy Frederick, Md. : Soc., 1952 53(1999), 3, Seite 266-277 (DE-627)129482595 (DE-600)204667-2 (DE-576)014865971 0003-7028 nnns volume:53 year:1999 number:3 pages:266-277 extent:12 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_55 GBV_ILN_59 GBV_ILN_70 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4027 GBV_ILN_4116 GBV_ILN_4125 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 VA 2367 33.07 AVZ 35.25 AVZ 33.18 AVZ AR 53 1999 3 266-277 12 |
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Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes |
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Submitted Papers - Characterization of Tantalum Films on Analytical Surfaces: Insights into Sputtering of Nonconductors in a Direct-Current Glow Discharge Using Secondary Cathodes |
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Schulze, Roland K. Maggiore, Carl Cooke, D.Wayne Havrilla, George |
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