Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering

Gespeichert in:

Autor*in:	Raveh, A. [verfasserIn] Weiss, M. Pinkas, M. Rosen, D.Z. Kimmel, G.

Format:	Artikel

Erschienen:	1999

Umfang:	9

Übergeordnetes Werk:	Enthalten in: Surface & coatings technology - Lausanne : Elsevier Sequoia, 1986, 114(1999), 2, Seite 269-277
Übergeordnetes Werk:	volume:114 ; year:1999 ; number:2 ; pages:269-277 ; extent:9

Katalog-ID:	OLC1553487842

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allfields	SW990520 (DE-627)OLC1553487842 (DE-599)GBVOLC1553487842 DE-627 ger DE-627 rakwb 620 670 52.78 bkl 51.20 bkl Raveh, A. verfasserin aut Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Weiss, M. oth Pinkas, M. oth Rosen, D.Z. oth Kimmel, G. oth Enthalten in Surface & coatings technology Lausanne : Elsevier Sequoia, 1986 114(1999), 2, Seite 269-277 (DE-627)129382892 (DE-600)165803-7 (DE-576)014769298 0257-8972 nnns volume:114 year:1999 number:2 pages:269-277 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_2048 GBV_ILN_4046 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4309 GBV_ILN_4316 52.78 AVZ 51.20 AVZ AR 114 1999 2 269-277 9
spelling	SW990520 (DE-627)OLC1553487842 (DE-599)GBVOLC1553487842 DE-627 ger DE-627 rakwb 620 670 52.78 bkl 51.20 bkl Raveh, A. verfasserin aut Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Weiss, M. oth Pinkas, M. oth Rosen, D.Z. oth Kimmel, G. oth Enthalten in Surface & coatings technology Lausanne : Elsevier Sequoia, 1986 114(1999), 2, Seite 269-277 (DE-627)129382892 (DE-600)165803-7 (DE-576)014769298 0257-8972 nnns volume:114 year:1999 number:2 pages:269-277 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_2048 GBV_ILN_4046 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4309 GBV_ILN_4316 52.78 AVZ 51.20 AVZ AR 114 1999 2 269-277 9
allfields_unstemmed	SW990520 (DE-627)OLC1553487842 (DE-599)GBVOLC1553487842 DE-627 ger DE-627 rakwb 620 670 52.78 bkl 51.20 bkl Raveh, A. verfasserin aut Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Weiss, M. oth Pinkas, M. oth Rosen, D.Z. oth Kimmel, G. oth Enthalten in Surface & coatings technology Lausanne : Elsevier Sequoia, 1986 114(1999), 2, Seite 269-277 (DE-627)129382892 (DE-600)165803-7 (DE-576)014769298 0257-8972 nnns volume:114 year:1999 number:2 pages:269-277 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_2048 GBV_ILN_4046 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4309 GBV_ILN_4316 52.78 AVZ 51.20 AVZ AR 114 1999 2 269-277 9
allfieldsGer	SW990520 (DE-627)OLC1553487842 (DE-599)GBVOLC1553487842 DE-627 ger DE-627 rakwb 620 670 52.78 bkl 51.20 bkl Raveh, A. verfasserin aut Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Weiss, M. oth Pinkas, M. oth Rosen, D.Z. oth Kimmel, G. oth Enthalten in Surface & coatings technology Lausanne : Elsevier Sequoia, 1986 114(1999), 2, Seite 269-277 (DE-627)129382892 (DE-600)165803-7 (DE-576)014769298 0257-8972 nnns volume:114 year:1999 number:2 pages:269-277 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_2048 GBV_ILN_4046 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4309 GBV_ILN_4316 52.78 AVZ 51.20 AVZ AR 114 1999 2 269-277 9
allfieldsSound	SW990520 (DE-627)OLC1553487842 (DE-599)GBVOLC1553487842 DE-627 ger DE-627 rakwb 620 670 52.78 bkl 51.20 bkl Raveh, A. verfasserin aut Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Weiss, M. oth Pinkas, M. oth Rosen, D.Z. oth Kimmel, G. oth Enthalten in Surface & coatings technology Lausanne : Elsevier Sequoia, 1986 114(1999), 2, Seite 269-277 (DE-627)129382892 (DE-600)165803-7 (DE-576)014769298 0257-8972 nnns volume:114 year:1999 number:2 pages:269-277 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2027 GBV_ILN_2048 GBV_ILN_4046 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4309 GBV_ILN_4316 52.78 AVZ 51.20 AVZ AR 114 1999 2 269-277 9
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Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering

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