ARTICLES - Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement

Gespeichert in:

Autor*in:	Spatenka, P. [verfasserIn] Vlcek, J. Blazek, J.

Format:	Artikel

Erschienen:	1999

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Vacuum - Kidlington : Elsevier Science, 1951, 55(1999), 2, Seite 165-170
Übergeordnetes Werk:	volume:55 ; year:1999 ; number:2 ; pages:165-170 ; extent:6

Katalog-ID:	OLC1560881674

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allfieldsSound	SW991013 (DE-627)OLC1560881674 (DE-599)GBVOLC1560881674 DE-627 ger DE-627 rakwb 530 Spatenka, P. verfasserin aut ARTICLES - Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement 1999 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Vlcek, J. oth Blazek, J. oth Enthalten in Vacuum Kidlington : Elsevier Science, 1951 55(1999), 2, Seite 165-170 (DE-627)129466492 (DE-600)201534-1 (DE-576)014832828 0042-207X nnns volume:55 year:1999 number:2 pages:165-170 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_11 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_55 GBV_ILN_59 GBV_ILN_65 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4319 GBV_ILN_4700 AR 55 1999 2 165-170 6
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ARTICLES - Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement

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