Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering

Gespeichert in:

Autor*in:	Jacobsohn, L.G. [verfasserIn] Freire Jr, F.L.

Format:	Artikel

Erschienen:	1999

Systematik:	UA 4921

Umfang:	9

Übergeordnetes Werk:	Enthalten in: Journal of vacuum science and technology / A - New York, NY : Inst., 1983, 17(1999), 5, Seite 2841-2849
Übergeordnetes Werk:	volume:17 ; year:1999 ; number:5 ; pages:2841-2849 ; extent:9

Katalog-ID:	OLC1560910607

Internformat


LEADER	01000caa a22002652 4500
001	OLC1560910607
003	DE-627
005	20230705112558.0
007	tu
008	991015s1999 xx \|\|\|\|\| 00\| \|\|und c
028	5	2	\|a SW991014
035			\|a (DE-627)OLC1560910607
035			\|a (DE-599)GBVOLC1560910607
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 530
084			\|a UA 4921 \|q AVZ \|2 rvk
100	1		\|a Jacobsohn, L.G. \|e verfasserin \|4 aut
245	1	0	\|a Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
264		1	\|c 1999
300			\|a 9
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Freire Jr, F.L. \|4 oth
773	0	8	\|i Enthalten in \|t Journal of vacuum science and technology / A \|d New York, NY : Inst., 1983 \|g 17(1999), 5, Seite 2841-2849 \|w (DE-627)130628336 \|w (DE-600)797704-9 \|w (DE-576)01613432X \|x 0734-2101 \|7 nnns
773	1	8	\|g volume:17 \|g year:1999 \|g number:5 \|g pages:2841-2849 \|g extent:9
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-PHY
912			\|a GBV_ILN_11
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_59
912			\|a GBV_ILN_62
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_105
912			\|a GBV_ILN_130
912			\|a GBV_ILN_170
912			\|a GBV_ILN_2002
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2007
912			\|a GBV_ILN_2010
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2015
912			\|a GBV_ILN_2016
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_4027
912			\|a GBV_ILN_4036
912			\|a GBV_ILN_4046
912			\|a GBV_ILN_4116
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4266
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4310
912			\|a GBV_ILN_4314
912			\|a GBV_ILN_4315
912			\|a GBV_ILN_4316
912			\|a GBV_ILN_4317
912			\|a GBV_ILN_4318
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4700
936	r	v	\|a UA 4921
951			\|a AR
952			\|d 17 \|j 1999 \|e 5 \|h 2841-2849 \|g 9

Indexfelder

author_variant	l j lj
matchkey_str	article:07342101:1999----::euaatceifunefhpampesroteirsrcuenotepiaadehnclrprisfmrhucrofls
hierarchy_sort_str	1999
publishDate	1999
allfields	SW991014 (DE-627)OLC1560910607 (DE-599)GBVOLC1560910607 DE-627 ger DE-627 rakwb 530 UA 4921 AVZ rvk Jacobsohn, L.G. verfasserin aut Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Freire Jr, F.L. oth Enthalten in Journal of vacuum science and technology / A New York, NY : Inst., 1983 17(1999), 5, Seite 2841-2849 (DE-627)130628336 (DE-600)797704-9 (DE-576)01613432X 0734-2101 nnns volume:17 year:1999 number:5 pages:2841-2849 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_69 GBV_ILN_70 GBV_ILN_105 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4027 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4317 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 4921 AR 17 1999 5 2841-2849 9
spelling	SW991014 (DE-627)OLC1560910607 (DE-599)GBVOLC1560910607 DE-627 ger DE-627 rakwb 530 UA 4921 AVZ rvk Jacobsohn, L.G. verfasserin aut Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Freire Jr, F.L. oth Enthalten in Journal of vacuum science and technology / A New York, NY : Inst., 1983 17(1999), 5, Seite 2841-2849 (DE-627)130628336 (DE-600)797704-9 (DE-576)01613432X 0734-2101 nnns volume:17 year:1999 number:5 pages:2841-2849 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_69 GBV_ILN_70 GBV_ILN_105 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4027 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4317 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 4921 AR 17 1999 5 2841-2849 9
allfields_unstemmed	SW991014 (DE-627)OLC1560910607 (DE-599)GBVOLC1560910607 DE-627 ger DE-627 rakwb 530 UA 4921 AVZ rvk Jacobsohn, L.G. verfasserin aut Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Freire Jr, F.L. oth Enthalten in Journal of vacuum science and technology / A New York, NY : Inst., 1983 17(1999), 5, Seite 2841-2849 (DE-627)130628336 (DE-600)797704-9 (DE-576)01613432X 0734-2101 nnns volume:17 year:1999 number:5 pages:2841-2849 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_69 GBV_ILN_70 GBV_ILN_105 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4027 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4317 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 4921 AR 17 1999 5 2841-2849 9
allfieldsGer	SW991014 (DE-627)OLC1560910607 (DE-599)GBVOLC1560910607 DE-627 ger DE-627 rakwb 530 UA 4921 AVZ rvk Jacobsohn, L.G. verfasserin aut Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Freire Jr, F.L. oth Enthalten in Journal of vacuum science and technology / A New York, NY : Inst., 1983 17(1999), 5, Seite 2841-2849 (DE-627)130628336 (DE-600)797704-9 (DE-576)01613432X 0734-2101 nnns volume:17 year:1999 number:5 pages:2841-2849 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_69 GBV_ILN_70 GBV_ILN_105 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4027 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4317 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 4921 AR 17 1999 5 2841-2849 9
allfieldsSound	SW991014 (DE-627)OLC1560910607 (DE-599)GBVOLC1560910607 DE-627 ger DE-627 rakwb 530 UA 4921 AVZ rvk Jacobsohn, L.G. verfasserin aut Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering 1999 9 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Freire Jr, F.L. oth Enthalten in Journal of vacuum science and technology / A New York, NY : Inst., 1983 17(1999), 5, Seite 2841-2849 (DE-627)130628336 (DE-600)797704-9 (DE-576)01613432X 0734-2101 nnns volume:17 year:1999 number:5 pages:2841-2849 extent:9 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_69 GBV_ILN_70 GBV_ILN_105 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4027 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4317 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 4921 AR 17 1999 5 2841-2849 9
source	Enthalten in Journal of vacuum science and technology / A 17(1999), 5, Seite 2841-2849 volume:17 year:1999 number:5 pages:2841-2849 extent:9
sourceStr	Enthalten in Journal of vacuum science and technology / A 17(1999), 5, Seite 2841-2849 volume:17 year:1999 number:5 pages:2841-2849 extent:9
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	530
isfreeaccess_bool	false
container_title	Journal of vacuum science and technology / A
authorswithroles_txt_mv	Jacobsohn, L.G. @@aut@@ Freire Jr, F.L. @@oth@@
publishDateDaySort_date	1999-01-01T00:00:00Z
hierarchy_top_id	130628336
dewey-sort	3530
id	OLC1560910607
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1560910607</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230705112558.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">991015s1999 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW991014</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1560910607</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1560910607</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 4921</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Jacobsohn, L.G.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">9</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Freire Jr, F.L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of vacuum science and technology / A</subfield><subfield code="d">New York, NY : Inst., 1983</subfield><subfield code="g">17(1999), 5, Seite 2841-2849</subfield><subfield code="w">(DE-627)130628336</subfield><subfield code="w">(DE-600)797704-9</subfield><subfield code="w">(DE-576)01613432X</subfield><subfield code="x">0734-2101</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:17</subfield><subfield code="g">year:1999</subfield><subfield code="g">number:5</subfield><subfield code="g">pages:2841-2849</subfield><subfield code="g">extent:9</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_59</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2002</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2016</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4310</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4314</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4315</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4316</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4317</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4318</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 4921</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">17</subfield><subfield code="j">1999</subfield><subfield code="e">5</subfield><subfield code="h">2841-2849</subfield><subfield code="g">9</subfield></datafield></record></collection>
author	Jacobsohn, L.G.
spellingShingle	Jacobsohn, L.G. ddc 530 rvk UA 4921 Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
authorStr	Jacobsohn, L.G.
ppnlink_with_tag_str_mv	@@773@@(DE-627)130628336
format	Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0734-2101
topic_title	530 UA 4921 AVZ rvk Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
topic	ddc 530 rvk UA 4921
topic_unstemmed	ddc 530 rvk UA 4921
topic_browse	ddc 530 rvk UA 4921
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	j f f jf jff
hierarchy_parent_title	Journal of vacuum science and technology / A
hierarchy_parent_id	130628336
dewey-tens	530 - Physics
hierarchy_top_title	Journal of vacuum science and technology / A
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)130628336 (DE-600)797704-9 (DE-576)01613432X
title	Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
ctrlnum	(DE-627)OLC1560910607 (DE-599)GBVOLC1560910607
title_full	Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
author_sort	Jacobsohn, L.G.
journal	Journal of vacuum science and technology / A
journalStr	Journal of vacuum science and technology / A
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	1999
contenttype_str_mv	txt
container_start_page	2841
author_browse	Jacobsohn, L.G.
container_volume	17
physical	9
class	530 UA 4921 AVZ rvk
format_se	Aufsätze
author-letter	Jacobsohn, L.G.
dewey-full	530
title_sort	regular articles - influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
title_auth	Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_69 GBV_ILN_70 GBV_ILN_105 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4027 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4316 GBV_ILN_4317 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700
container_issue	5
title_short	Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
remote_bool	false
author2	Freire Jr, F.L.
author2Str	Freire Jr, F.L.
ppnlink	130628336
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth
up_date	2024-07-03T20:48:39.318Z
_version_	1803592368724639744
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1560910607</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230705112558.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">991015s1999 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW991014</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1560910607</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1560910607</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 4921</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Jacobsohn, L.G.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">9</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Freire Jr, F.L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of vacuum science and technology / A</subfield><subfield code="d">New York, NY : Inst., 1983</subfield><subfield code="g">17(1999), 5, Seite 2841-2849</subfield><subfield code="w">(DE-627)130628336</subfield><subfield code="w">(DE-600)797704-9</subfield><subfield code="w">(DE-576)01613432X</subfield><subfield code="x">0734-2101</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:17</subfield><subfield code="g">year:1999</subfield><subfield code="g">number:5</subfield><subfield code="g">pages:2841-2849</subfield><subfield code="g">extent:9</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_59</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2002</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2016</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4310</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4314</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4315</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4316</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4317</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4318</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 4921</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">17</subfield><subfield code="j">1999</subfield><subfield code="e">5</subfield><subfield code="h">2841-2849</subfield><subfield code="g">9</subfield></datafield></record></collection>
score	7.398946

Nicht das Richtige dabei?

Schreiben Sie uns!

Regular Articles - Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?