Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface

Gespeichert in:

Autor*in:	Asai, K. [verfasserIn] Komachi, K. Kamei, K. Katahama, H.

Format:	Artikel

Erschienen:	2000

Umfang:	9

Übergeordnetes Werk:	Enthalten in: Applied surface science - Amsterdam [u.a.] : Elsevier, 1985, 153(2000), 2, Seite 134-142
Übergeordnetes Werk:	volume:153 ; year:2000 ; number:2 ; pages:134-142 ; extent:9

Katalog-ID:	OLC1565479246

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Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface

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