Shop Notes - Cryogenic substrate cooling or substrate heating without vacuum feedthroughs

Gespeichert in:

Autor*in:	Smith, W.F. [verfasserIn] Stokes, B.G. Crawford, J.F.

Format:	Artikel

Erschienen:	2000

Systematik:	UA 4921

Umfang:	3

Übergeordnetes Werk:	Enthalten in: Journal of vacuum science and technology / A - New York, NY : Inst., 1983, 18(2000), 1, Seite 290-292
Übergeordnetes Werk:	volume:18 ; year:2000 ; number:1 ; pages:290-292 ; extent:3

Katalog-ID:	OLC1567242855

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