Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure

Gespeichert in:

Autor*in:	Huang, J.S. [verfasserIn] Oates, A.S. Zhao, J.

Format:	Artikel

Erschienen:	2000

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Thin solid films - Amsterdam [u.a.] Elsevier, 1967, 365(2000), 1, Seite 110-115
Übergeordnetes Werk:	volume:365 ; year:2000 ; number:1 ; pages:110-115 ; extent:6

Katalog-ID:	OLC1571011110

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allfields	SW000426 (DE-627)OLC1571011110 (DE-599)GBVOLC1571011110 DE-627 ger DE-627 rakwb 050 530 530 AVZ Huang, J.S. verfasserin aut Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure 2000 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Oates, A.S. oth Zhao, J. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 365(2000), 1, Seite 110-115 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:365 year:2000 number:1 pages:110-115 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 365 2000 1 110-115 6
spelling	SW000426 (DE-627)OLC1571011110 (DE-599)GBVOLC1571011110 DE-627 ger DE-627 rakwb 050 530 530 AVZ Huang, J.S. verfasserin aut Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure 2000 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Oates, A.S. oth Zhao, J. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 365(2000), 1, Seite 110-115 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:365 year:2000 number:1 pages:110-115 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 365 2000 1 110-115 6
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allfieldsGer	SW000426 (DE-627)OLC1571011110 (DE-599)GBVOLC1571011110 DE-627 ger DE-627 rakwb 050 530 530 AVZ Huang, J.S. verfasserin aut Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure 2000 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Oates, A.S. oth Zhao, J. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 365(2000), 1, Seite 110-115 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:365 year:2000 number:1 pages:110-115 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 365 2000 1 110-115 6
allfieldsSound	SW000426 (DE-627)OLC1571011110 (DE-599)GBVOLC1571011110 DE-627 ger DE-627 rakwb 050 530 530 AVZ Huang, J.S. verfasserin aut Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure 2000 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Oates, A.S. oth Zhao, J. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 365(2000), 1, Seite 110-115 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:365 year:2000 number:1 pages:110-115 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 365 2000 1 110-115 6
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