Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction

Gespeichert in:

Autor*in:	Kudo, Yoshihiro [verfasserIn] Liu, Kuang-Yu Kawado, Seiji Kashiwagi, Akihide Hirano, Keiichi

Format:	Artikel

Erschienen:	2000

Systematik:	UA 4210.

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers - Tokyo : Ōyō Butsuri Gakkai, 1982, 39(2000), 3, A, Seite 1409-1413
Übergeordnetes Werk:	volume:39 ; year:2000 ; number:3 ; supplement:A ; pages:1409-1413 ; extent:5

Katalog-ID:	OLC1572675667

Internformat


LEADER	01000caa a22002652 4500
001	OLC1572675667
003	DE-627
005	20230705154024.0
007	tu
008	000526s2000 xx \|\|\|\|\| 00\| \|\|und c
028	5	2	\|a SW000526
035			\|a (DE-627)OLC1572675667
035			\|a (DE-599)GBVOLC1572675667
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 530
084			\|a UA 4210. \|q AVZ \|2 rvk
100	1		\|a Kudo, Yoshihiro \|e verfasserin \|4 aut
245	1	0	\|a Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
264		1	\|c 2000
300			\|a 5
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Liu, Kuang-Yu \|4 oth
700	1		\|a Kawado, Seiji \|4 oth
700	1		\|a Kashiwagi, Akihide \|4 oth
700	1		\|a Hirano, Keiichi \|4 oth
773	0	8	\|i Enthalten in \|t Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers \|d Tokyo : Ōyō Butsuri Gakkai, 1982 \|g 39(2000), 3, A, Seite 1409-1413 \|w (DE-627)130626937 \|w (DE-600)797294-5 \|w (DE-576)016133269 \|x 0021-4922 \|7 nnns
773	1	8	\|g volume:39 \|g year:2000 \|g number:3 \|g supplement:A \|g pages:1409-1413 \|g extent:5
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-PHY
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_30
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_62
912			\|a GBV_ILN_70
912			\|a GBV_ILN_100
912			\|a GBV_ILN_170
912			\|a GBV_ILN_2001
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2007
912			\|a GBV_ILN_2010
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2015
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2185
912			\|a GBV_ILN_4036
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4116
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4314
912			\|a GBV_ILN_4315
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4700
936	r	v	\|a UA 4210.
951			\|a AR
952			\|d 39 \|j 2000 \|e 3 \|f A \|h 1409-1413 \|g 5

Indexfelder

author_variant	y k yk
matchkey_str	article:00214922:2000----::ntuettomaueetnfbiainehooyeemntooteestadhtikesfi2imui
hierarchy_sort_str	2000
publishDate	2000
allfields	SW000526 (DE-627)OLC1572675667 (DE-599)GBVOLC1572675667 DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Kudo, Yoshihiro verfasserin aut Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction 2000 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Liu, Kuang-Yu oth Kawado, Seiji oth Kashiwagi, Akihide oth Hirano, Keiichi oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 39(2000), 3, A, Seite 1409-1413 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 39 2000 3 A 1409-1413 5
spelling	SW000526 (DE-627)OLC1572675667 (DE-599)GBVOLC1572675667 DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Kudo, Yoshihiro verfasserin aut Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction 2000 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Liu, Kuang-Yu oth Kawado, Seiji oth Kashiwagi, Akihide oth Hirano, Keiichi oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 39(2000), 3, A, Seite 1409-1413 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 39 2000 3 A 1409-1413 5
allfields_unstemmed	SW000526 (DE-627)OLC1572675667 (DE-599)GBVOLC1572675667 DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Kudo, Yoshihiro verfasserin aut Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction 2000 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Liu, Kuang-Yu oth Kawado, Seiji oth Kashiwagi, Akihide oth Hirano, Keiichi oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 39(2000), 3, A, Seite 1409-1413 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 39 2000 3 A 1409-1413 5
allfieldsGer	SW000526 (DE-627)OLC1572675667 (DE-599)GBVOLC1572675667 DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Kudo, Yoshihiro verfasserin aut Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction 2000 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Liu, Kuang-Yu oth Kawado, Seiji oth Kashiwagi, Akihide oth Hirano, Keiichi oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 39(2000), 3, A, Seite 1409-1413 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 39 2000 3 A 1409-1413 5
allfieldsSound	SW000526 (DE-627)OLC1572675667 (DE-599)GBVOLC1572675667 DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Kudo, Yoshihiro verfasserin aut Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction 2000 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Liu, Kuang-Yu oth Kawado, Seiji oth Kashiwagi, Akihide oth Hirano, Keiichi oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 39(2000), 3, A, Seite 1409-1413 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 39 2000 3 A 1409-1413 5
source	Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers 39(2000), 3, A, Seite 1409-1413 volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5
sourceStr	Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers 39(2000), 3, A, Seite 1409-1413 volume:39 year:2000 number:3 supplement:A pages:1409-1413 extent:5
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	530
isfreeaccess_bool	false
container_title	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
authorswithroles_txt_mv	Kudo, Yoshihiro @@aut@@ Liu, Kuang-Yu @@oth@@ Kawado, Seiji @@oth@@ Kashiwagi, Akihide @@oth@@ Hirano, Keiichi @@oth@@
publishDateDaySort_date	2000-01-01T00:00:00Z
hierarchy_top_id	130626937
dewey-sort	3530
id	OLC1572675667
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1572675667</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230705154024.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">000526s2000 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW000526</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1572675667</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1572675667</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 4210.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kudo, Yoshihiro</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Liu, Kuang-Yu</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kawado, Seiji</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kashiwagi, Akihide</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hirano, Keiichi</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers</subfield><subfield code="d">Tokyo : Ōyō Butsuri Gakkai, 1982</subfield><subfield code="g">39(2000), 3, A, Seite 1409-1413</subfield><subfield code="w">(DE-627)130626937</subfield><subfield code="w">(DE-600)797294-5</subfield><subfield code="w">(DE-576)016133269</subfield><subfield code="x">0021-4922</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:39</subfield><subfield code="g">year:2000</subfield><subfield code="g">number:3</subfield><subfield code="g">supplement:A</subfield><subfield code="g">pages:1409-1413</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2001</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4314</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4315</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 4210.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">39</subfield><subfield code="j">2000</subfield><subfield code="e">3</subfield><subfield code="f">A</subfield><subfield code="h">1409-1413</subfield><subfield code="g">5</subfield></datafield></record></collection>
author	Kudo, Yoshihiro
spellingShingle	Kudo, Yoshihiro ddc 530 rvk UA 4210. Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
authorStr	Kudo, Yoshihiro
ppnlink_with_tag_str_mv	@@773@@(DE-627)130626937
format	Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0021-4922
topic_title	530 UA 4210. AVZ rvk Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
topic	ddc 530 rvk UA 4210.
topic_unstemmed	ddc 530 rvk UA 4210.
topic_browse	ddc 530 rvk UA 4210.
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	k y l kyl s k sk a k ak k h kh
hierarchy_parent_title	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
hierarchy_parent_id	130626937
dewey-tens	530 - Physics
hierarchy_top_title	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)130626937 (DE-600)797294-5 (DE-576)016133269
title	Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
ctrlnum	(DE-627)OLC1572675667 (DE-599)GBVOLC1572675667
title_full	Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
author_sort	Kudo, Yoshihiro
journal	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
journalStr	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	2000
contenttype_str_mv	txt
container_start_page	1409
author_browse	Kudo, Yoshihiro
container_volume	39
physical	5
class	530 UA 4210. AVZ rvk
format_se	Aufsätze
author-letter	Kudo, Yoshihiro
dewey-full	530
title_sort	instrumentation, measurement, and fabrication technology - determination of the density and the thickness of sio2 films using extremely asymmetric x-ray diffraction
title_auth	Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4700
container_issue	3
title_short	Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction
remote_bool	false
author2	Liu, Kuang-Yu Kawado, Seiji Kashiwagi, Akihide Hirano, Keiichi
author2Str	Liu, Kuang-Yu Kawado, Seiji Kashiwagi, Akihide Hirano, Keiichi
ppnlink	130626937
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth oth
up_date	2024-07-04T01:03:11.891Z
_version_	1803608383182340096
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1572675667</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230705154024.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">000526s2000 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW000526</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1572675667</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1572675667</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 4210.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kudo, Yoshihiro</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Liu, Kuang-Yu</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kawado, Seiji</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kashiwagi, Akihide</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hirano, Keiichi</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers</subfield><subfield code="d">Tokyo : Ōyō Butsuri Gakkai, 1982</subfield><subfield code="g">39(2000), 3, A, Seite 1409-1413</subfield><subfield code="w">(DE-627)130626937</subfield><subfield code="w">(DE-600)797294-5</subfield><subfield code="w">(DE-576)016133269</subfield><subfield code="x">0021-4922</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:39</subfield><subfield code="g">year:2000</subfield><subfield code="g">number:3</subfield><subfield code="g">supplement:A</subfield><subfield code="g">pages:1409-1413</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2001</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4314</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4315</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 4210.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">39</subfield><subfield code="j">2000</subfield><subfield code="e">3</subfield><subfield code="f">A</subfield><subfield code="h">1409-1413</subfield><subfield code="g">5</subfield></datafield></record></collection>
score	7.399083

Nicht das Richtige dabei?

Schreiben Sie uns!

Instrumentation, Measurement, and Fabrication Technology - Determination of the Density and the Thickness of SiO2 Films Using Extremely Asymmetric X-Ray Diffraction

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?