Si-SiGe n-type inverted modulation doping using ion implantation

Gespeichert in:

Autor*in:	Ahmed, A. [verfasserIn] Dunford, R.B. Paul, D.J. Pepper, M. Churchill, A.C. Robbins, D.J. Pidduck, A.J.

Format:	Artikel

Erschienen:	2000

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Thin solid films - Amsterdam [u.a.] Elsevier, 1967, 369(2000), 1-2, Seite 324-327
Übergeordnetes Werk:	volume:369 ; year:2000 ; number:1-2 ; pages:324-327 ; extent:4

Katalog-ID:	OLC1582666067

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allfields	SW001024 (DE-627)OLC1582666067 (DE-599)GBVOLC1582666067 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ahmed, A. verfasserin aut Si-SiGe n-type inverted modulation doping using ion implantation 2000 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Dunford, R.B. oth Paul, D.J. oth Pepper, M. oth Churchill, A.C. oth Robbins, D.J. oth Pidduck, A.J. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 369(2000), 1-2, Seite 324-327 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:369 year:2000 number:1-2 pages:324-327 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 369 2000 1-2 324-327 4
spelling	SW001024 (DE-627)OLC1582666067 (DE-599)GBVOLC1582666067 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ahmed, A. verfasserin aut Si-SiGe n-type inverted modulation doping using ion implantation 2000 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Dunford, R.B. oth Paul, D.J. oth Pepper, M. oth Churchill, A.C. oth Robbins, D.J. oth Pidduck, A.J. oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 369(2000), 1-2, Seite 324-327 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:369 year:2000 number:1-2 pages:324-327 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_2006 GBV_ILN_2016 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 369 2000 1-2 324-327 4
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Si-SiGe n-type inverted modulation doping using ion implantation

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