Quantum electron beam probe of sidewall dry-etch damage

Gespeichert in:

Autor*in:	Rahman, M. [verfasserIn] Williamson, J.G. Mathieson, K. Dick, G. Brown, M.J. Duffy, S. Wilkinson, C.D.W.

Format:	Artikel

Erschienen:	2000

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 53(2000), 1-4, Seite 371-374
Übergeordnetes Werk:	volume:53 ; year:2000 ; number:1-4 ; pages:371-374 ; extent:4

Katalog-ID:	OLC1583229736

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