Hydrodynamic analysis of chemical mechanical polishing process

Gespeichert in:

Autor*in:	Park, Sang-Shin [verfasserIn] Cho, Chul-Ho Ahn, Yoomin

Format:	Artikel

Erschienen:	2000

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Tribology international - Oxford : Butterworth-Heinemann, 1974, 33(2000), 10, Seite 723-730
Übergeordnetes Werk:	volume:33 ; year:2000 ; number:10 ; pages:723-730 ; extent:8

Katalog-ID:	OLC1584191104

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