Laser ablation and micropatterning of thin TiN coatings

Gespeichert in:

Autor*in:	Kononenko, T.V. [verfasserIn] Garnov, S.V. Pimenov, S.M. Konov, V.I. Romano, V. Borsos, B. Weber, H.P.

Format:	Artikel

Erschienen:	2000

Systematik:	UA 9001.

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Applied physics. A, Materials science & processing - Berlin : Springer, 1981, 71(2000), 6, Seite 627-632
Übergeordnetes Werk:	volume:71 ; year:2000 ; number:6 ; pages:627-632 ; extent:6

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spelling	SW001117 (DE-627)OLC158421483X (DE-599)GBVOLC158421483X DE-627 ger DE-627 rakwb 530 620 UA 9001. AVZ rvk Kononenko, T.V. verfasserin aut Laser ablation and micropatterning of thin TiN coatings 2000 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Garnov, S.V. oth Pimenov, S.M. oth Konov, V.I. oth Romano, V. oth Borsos, B. oth Weber, H.P. oth Enthalten in Applied physics. A, Materials science & processing Berlin : Springer, 1981 71(2000), 6, Seite 627-632 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:71 year:2000 number:6 pages:627-632 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001. AR 71 2000 6 627-632 6
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allfieldsSound	SW001117 (DE-627)OLC158421483X (DE-599)GBVOLC158421483X DE-627 ger DE-627 rakwb 530 620 UA 9001. AVZ rvk Kononenko, T.V. verfasserin aut Laser ablation and micropatterning of thin TiN coatings 2000 6 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Garnov, S.V. oth Pimenov, S.M. oth Konov, V.I. oth Romano, V. oth Borsos, B. oth Weber, H.P. oth Enthalten in Applied physics. A, Materials science & processing Berlin : Springer, 1981 71(2000), 6, Seite 627-632 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:71 year:2000 number:6 pages:627-632 extent:6 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001. AR 71 2000 6 627-632 6
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Laser ablation and micropatterning of thin TiN coatings

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