MICROFABRICATION - Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

Gespeichert in:

Autor*in:	Yongqi, Fu [verfasserIn] Ngoi, Bryan Kok Ann

Format:	Artikel

Erschienen:	2000

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Optical engineering - Bellingham, Wash. : SPIE, 1972, 39(2000), 11, Seite 3008-3013
Übergeordnetes Werk:	volume:39 ; year:2000 ; number:11 ; pages:3008-3013 ; extent:6

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