Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres

Gespeichert in:

Autor*in:	Pedraza, A.J. [verfasserIn] Fowlkes, J.D. Jesse, S. Mao, C. Lowndes, D.H.

Format:	Artikel

Erschienen:	2001

Umfang:	7

Übergeordnetes Werk:	Enthalten in: Applied surface science - Amsterdam [u.a.] : Elsevier, 1985, 168(2001), 1, Seite 251-257
Übergeordnetes Werk:	volume:168 ; year:2001 ; number:1 ; pages:251-257 ; extent:7

Katalog-ID:	OLC1586373919

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spelling	SW001227 (DE-627)OLC1586373919 (DE-599)GBVOLC1586373919 DE-627 ger DE-627 rakwb 670 530 660 Pedraza, A.J. verfasserin aut Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres 2001 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Fowlkes, J.D. oth Jesse, S. oth Mao, C. oth Lowndes, D.H. oth Enthalten in Applied surface science Amsterdam [u.a.] : Elsevier, 1985 168(2001), 1, Seite 251-257 (DE-627)129187496 (DE-600)52886-9 (DE-576)014456311 0169-4332 nnns volume:168 year:2001 number:1 pages:251-257 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_22 GBV_ILN_30 GBV_ILN_32 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_4046 GBV_ILN_4314 GBV_ILN_4700 AR 168 2001 1 251-257 7
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Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres

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