The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure

Gespeichert in:

Autor*in:	Ijdiyaou, Y. [verfasserIn] Hafidi, K. Azizan, M. Ameziane, E.L. Patrat, G. Brunel, M. Ortega, L. Tan, T.A.Nguyen

Format:	Artikel

Erschienen:	1995

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Thin solid films - Amsterdam [u.a.] Elsevier, 1967, 266(1995), 2, Seite 224-228
Übergeordnetes Werk:	volume:266 ; year:1995 ; number:2 ; pages:224-228 ; extent:5

Katalog-ID:	OLC1589488512

Internformat


LEADER	01000caa a22002652 4500
001	OLC1589488512
003	DE-627
005	20220223184343.0
007	tu
008	960108s1995 xx \|\|\|\|\| 00\| \|\|und c
035			\|a (DE-627)OLC1589488512
035			\|a (DE-599)GBVOLC1589488512
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 050 \|a 530
082	0	4	\|a 530 \|q AVZ
100	1		\|a Ijdiyaou, Y. \|e verfasserin \|4 aut
245	1	4	\|a The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
264		1	\|c 1995
300			\|a 5
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Hafidi, K. \|4 oth
700	1		\|a Azizan, M. \|4 oth
700	1		\|a Ameziane, E.L. \|4 oth
700	1		\|a Patrat, G. \|4 oth
700	1		\|a Brunel, M. \|4 oth
700	1		\|a Ortega, L. \|4 oth
700	1		\|a Tan, T.A.Nguyen \|4 oth
773	0	8	\|i Enthalten in \|t Thin solid films \|d Amsterdam [u.a.] Elsevier, 1967 \|g 266(1995), 2, Seite 224-228 \|w (DE-627)129522287 \|w (DE-600)212814-7 \|w (DE-576)014938588 \|x 0040-6090 \|7 nnns
773	1	8	\|g volume:266 \|g year:1995 \|g number:2 \|g pages:224-228 \|g extent:5
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-TEC
912			\|a SSG-OLC-PHY
912			\|a SSG-OLC-CHE
912			\|a GBV_ILN_20
912			\|a GBV_ILN_21
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_30
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_62
912			\|a GBV_ILN_65
912			\|a GBV_ILN_69
912			\|a GBV_ILN_70
912			\|a GBV_ILN_130
912			\|a GBV_ILN_150
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2027
912			\|a GBV_ILN_2279
912			\|a GBV_ILN_4036
912			\|a GBV_ILN_4046
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 266 \|j 1995 \|e 2 \|h 224-228 \|g 5

Indexfelder

author_variant	y i yi
matchkey_str	article:00406090:1995----::hfrainfpteetainaianefcsns
hierarchy_sort_str	1995
publishDate	1995
allfields	(DE-627)OLC1589488512 (DE-599)GBVOLC1589488512 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ijdiyaou, Y. verfasserin aut The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure 1995 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Hafidi, K. oth Azizan, M. oth Ameziane, E.L. oth Patrat, G. oth Brunel, M. oth Ortega, L. oth Tan, T.A.Nguyen oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 266(1995), 2, Seite 224-228 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:266 year:1995 number:2 pages:224-228 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 266 1995 2 224-228 5
spelling	(DE-627)OLC1589488512 (DE-599)GBVOLC1589488512 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ijdiyaou, Y. verfasserin aut The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure 1995 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Hafidi, K. oth Azizan, M. oth Ameziane, E.L. oth Patrat, G. oth Brunel, M. oth Ortega, L. oth Tan, T.A.Nguyen oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 266(1995), 2, Seite 224-228 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:266 year:1995 number:2 pages:224-228 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 266 1995 2 224-228 5
allfields_unstemmed	(DE-627)OLC1589488512 (DE-599)GBVOLC1589488512 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ijdiyaou, Y. verfasserin aut The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure 1995 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Hafidi, K. oth Azizan, M. oth Ameziane, E.L. oth Patrat, G. oth Brunel, M. oth Ortega, L. oth Tan, T.A.Nguyen oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 266(1995), 2, Seite 224-228 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:266 year:1995 number:2 pages:224-228 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 266 1995 2 224-228 5
allfieldsGer	(DE-627)OLC1589488512 (DE-599)GBVOLC1589488512 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ijdiyaou, Y. verfasserin aut The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure 1995 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Hafidi, K. oth Azizan, M. oth Ameziane, E.L. oth Patrat, G. oth Brunel, M. oth Ortega, L. oth Tan, T.A.Nguyen oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 266(1995), 2, Seite 224-228 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:266 year:1995 number:2 pages:224-228 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 266 1995 2 224-228 5
allfieldsSound	(DE-627)OLC1589488512 (DE-599)GBVOLC1589488512 DE-627 ger DE-627 rakwb 050 530 530 AVZ Ijdiyaou, Y. verfasserin aut The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure 1995 5 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Hafidi, K. oth Azizan, M. oth Ameziane, E.L. oth Patrat, G. oth Brunel, M. oth Ortega, L. oth Tan, T.A.Nguyen oth Enthalten in Thin solid films Amsterdam [u.a.] Elsevier, 1967 266(1995), 2, Seite 224-228 (DE-627)129522287 (DE-600)212814-7 (DE-576)014938588 0040-6090 nnns volume:266 year:1995 number:2 pages:224-228 extent:5 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700 AR 266 1995 2 224-228 5
source	Enthalten in Thin solid films 266(1995), 2, Seite 224-228 volume:266 year:1995 number:2 pages:224-228 extent:5
sourceStr	Enthalten in Thin solid films 266(1995), 2, Seite 224-228 volume:266 year:1995 number:2 pages:224-228 extent:5
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	050
isfreeaccess_bool	false
container_title	Thin solid films
authorswithroles_txt_mv	Ijdiyaou, Y. @@aut@@ Hafidi, K. @@oth@@ Azizan, M. @@oth@@ Ameziane, E.L. @@oth@@ Patrat, G. @@oth@@ Brunel, M. @@oth@@ Ortega, L. @@oth@@ Tan, T.A.Nguyen @@oth@@
publishDateDaySort_date	1995-01-01T00:00:00Z
hierarchy_top_id	129522287
dewey-sort	250
id	OLC1589488512
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1589488512</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20220223184343.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">960108s1995 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1589488512</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1589488512</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">050</subfield><subfield code="a">530</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">AVZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ijdiyaou, Y.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="4"><subfield code="a">The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hafidi, K.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Azizan, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ameziane, E.L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Patrat, G.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Brunel, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ortega, L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tan, T.A.Nguyen</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Thin solid films</subfield><subfield code="d">Amsterdam [u.a.] Elsevier, 1967</subfield><subfield code="g">266(1995), 2, Seite 224-228</subfield><subfield code="w">(DE-627)129522287</subfield><subfield code="w">(DE-600)212814-7</subfield><subfield code="w">(DE-576)014938588</subfield><subfield code="x">0040-6090</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:266</subfield><subfield code="g">year:1995</subfield><subfield code="g">number:2</subfield><subfield code="g">pages:224-228</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-CHE</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2279</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">266</subfield><subfield code="j">1995</subfield><subfield code="e">2</subfield><subfield code="h">224-228</subfield><subfield code="g">5</subfield></datafield></record></collection>
author	Ijdiyaou, Y.
spellingShingle	Ijdiyaou, Y. ddc 050 ddc 530 The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
authorStr	Ijdiyaou, Y.
ppnlink_with_tag_str_mv	@@773@@(DE-627)129522287
format	Article
dewey-ones	050 - General serial publications 530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0040-6090
topic_title	050 530 530 AVZ The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
topic	ddc 050 ddc 530
topic_unstemmed	ddc 050 ddc 530
topic_browse	ddc 050 ddc 530
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	k h kh m a ma e a ea g p gp m b mb l o lo t t tt
hierarchy_parent_title	Thin solid films
hierarchy_parent_id	129522287
dewey-tens	050 - Magazines, journals & serials 530 - Physics
hierarchy_top_title	Thin solid films
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)129522287 (DE-600)212814-7 (DE-576)014938588
title	The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
ctrlnum	(DE-627)OLC1589488512 (DE-599)GBVOLC1589488512
title_full	The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
author_sort	Ijdiyaou, Y.
journal	Thin solid films
journalStr	Thin solid films
isOA_bool	false
dewey-hundreds	000 - Computer science, information & general works 500 - Science
recordtype	marc
publishDateSort	1995
contenttype_str_mv	txt
container_start_page	224
author_browse	Ijdiyaou, Y.
container_volume	266
physical	5
class	050 530 530 AVZ
format_se	Aufsätze
author-letter	Ijdiyaou, Y.
dewey-full	050 530
title_sort	formation of sputtered ta-a-si and a-si-ta interfaces in a-si-ta-a-si-c-si structure
title_auth	The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_2006 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2279 GBV_ILN_4036 GBV_ILN_4046 GBV_ILN_4126 GBV_ILN_4319 GBV_ILN_4700
container_issue	2
title_short	The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure
remote_bool	false
author2	Hafidi, K. Azizan, M. Ameziane, E.L. Patrat, G. Brunel, M. Ortega, L. Tan, T.A.Nguyen
author2Str	Hafidi, K. Azizan, M. Ameziane, E.L. Patrat, G. Brunel, M. Ortega, L. Tan, T.A.Nguyen
ppnlink	129522287
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth oth oth oth oth
up_date	2024-07-03T14:10:44.958Z
_version_	1803567334640582656
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1589488512</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20220223184343.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">960108s1995 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1589488512</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1589488512</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">050</subfield><subfield code="a">530</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">AVZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ijdiyaou, Y.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="4"><subfield code="a">The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">5</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hafidi, K.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Azizan, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ameziane, E.L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Patrat, G.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Brunel, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ortega, L.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tan, T.A.Nguyen</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Thin solid films</subfield><subfield code="d">Amsterdam [u.a.] Elsevier, 1967</subfield><subfield code="g">266(1995), 2, Seite 224-228</subfield><subfield code="w">(DE-627)129522287</subfield><subfield code="w">(DE-600)212814-7</subfield><subfield code="w">(DE-576)014938588</subfield><subfield code="x">0040-6090</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:266</subfield><subfield code="g">year:1995</subfield><subfield code="g">number:2</subfield><subfield code="g">pages:224-228</subfield><subfield code="g">extent:5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-CHE</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_65</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_69</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_150</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2279</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4046</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">266</subfield><subfield code="j">1995</subfield><subfield code="e">2</subfield><subfield code="h">224-228</subfield><subfield code="g">5</subfield></datafield></record></collection>
score	7.3999605

Nicht das Richtige dabei?

Schreiben Sie uns!

The formation of sputtered Ta-a-Si and a-Si-Ta interfaces in a-Si-Ta-a-Si-c-Si structure

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?