Instrumentation, Measurement, and Fabrication Technology - Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation

Gespeichert in:

Autor*in:	Yamamoto, Tetsuya [verfasserIn] Ono, Mitsuhiro Ando, Makoto Goto, Naohisa Ishii, Nobuo Yasaka, Yasuyoshi

Format:	Artikel

Erschienen:	2001

Systematik:	UA 4210.

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers - Tokyo : Ōyō Butsuri Gakkai, 1982, 40(2001), 1, Seite 380-387
Übergeordnetes Werk:	volume:40 ; year:2001 ; number:1 ; pages:380-387 ; extent:8

Katalog-ID:	OLC1601884567

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title_short	Instrumentation, Measurement, and Fabrication Technology - Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
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author2	Ono, Mitsuhiro Ando, Makoto Goto, Naohisa Ishii, Nobuo Yasaka, Yasuyoshi
author2Str	Ono, Mitsuhiro Ando, Makoto Goto, Naohisa Ishii, Nobuo Yasaka, Yasuyoshi
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up_date	2024-07-03T18:57:18.133Z
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