Investigation of the structure and properties of a-C:H coatings with metal and silicon containing interlayers

Gespeichert in:

Autor*in:	Nöthe, M. [verfasserIn] Breuer, U. Koch, F. Penkalla, H.J. Rehbach, W.P. Bolt, H.

Format:	Artikel

Erschienen:	2001

Umfang:	7

Übergeordnetes Werk:	Enthalten in: Applied surface science - Amsterdam [u.a.] : Elsevier, 1985, 179(2001), 1, Seite 123-129
Übergeordnetes Werk:	volume:179 ; year:2001 ; number:1 ; pages:123-129 ; extent:7

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Investigation of the structure and properties of a-C:H coatings with metal and silicon containing interlayers

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