Application of NRA to evaluation of boron implants in Si for shallow junctions

Gespeichert in:

Autor*in:	Suzuki, M. [verfasserIn] Tomita, M. Murakoshi, A.

Format:	Artikel

Erschienen:	2002

Systematik:	UA 5680.

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms - Amsterdam [u.a.] : Elsevier, 1984, 190(2002), Seite 552-555
Übergeordnetes Werk:	volume:190 ; year:2002 ; pages:552-555 ; extent:4

Katalog-ID:	OLC1625005075

Internformat


LEADER	01000caa a22002652 4500
001	OLC1625005075
003	DE-627
005	20230706153237.0
007	tu
008	020610s2002 xx \|\|\|\|\| 00\| \|\|und c
028	5	2	\|a SW020610
035			\|a (DE-627)OLC1625005075
035			\|a (DE-599)GBVOLC1625005075
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 530
084			\|a UA 5680. \|q AVZ \|2 rvk
100	1		\|a Suzuki, M. \|e verfasserin \|4 aut
245	1	0	\|a Application of NRA to evaluation of boron implants in Si for shallow junctions
264		1	\|c 2002
300			\|a 4
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Tomita, M. \|4 oth
700	1		\|a Murakoshi, A. \|4 oth
773	0	8	\|i Enthalten in \|t Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms \|d Amsterdam [u.a.] : Elsevier, 1984 \|g 190(2002), Seite 552-555 \|w (DE-627)129862266 \|w (DE-600)283666-X \|w (DE-576)015173690 \|x 0168-583X \|7 nnns
773	1	8	\|g volume:190 \|g year:2002 \|g pages:552-555 \|g extent:4
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-PHY
912			\|a GBV_ILN_11
912			\|a GBV_ILN_31
912			\|a GBV_ILN_70
912			\|a GBV_ILN_130
912			\|a GBV_ILN_170
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2010
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_4082
912			\|a GBV_ILN_4266
912			\|a GBV_ILN_4700
936	r	v	\|a UA 5680.
951			\|a AR
952			\|d 190 \|j 2002 \|h 552-555 \|g 4

Indexfelder

author_variant	m s ms
matchkey_str	article:0168583X:2002----::plctoonaovlainfooipatisf
hierarchy_sort_str	2002
publishDate	2002
allfields	SW020610 (DE-627)OLC1625005075 (DE-599)GBVOLC1625005075 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Suzuki, M. verfasserin aut Application of NRA to evaluation of boron implants in Si for shallow junctions 2002 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tomita, M. oth Murakoshi, A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 190(2002), Seite 552-555 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:190 year:2002 pages:552-555 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_31 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_4082 GBV_ILN_4266 GBV_ILN_4700 UA 5680. AR 190 2002 552-555 4
spelling	SW020610 (DE-627)OLC1625005075 (DE-599)GBVOLC1625005075 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Suzuki, M. verfasserin aut Application of NRA to evaluation of boron implants in Si for shallow junctions 2002 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tomita, M. oth Murakoshi, A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 190(2002), Seite 552-555 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:190 year:2002 pages:552-555 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_31 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_4082 GBV_ILN_4266 GBV_ILN_4700 UA 5680. AR 190 2002 552-555 4
allfields_unstemmed	SW020610 (DE-627)OLC1625005075 (DE-599)GBVOLC1625005075 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Suzuki, M. verfasserin aut Application of NRA to evaluation of boron implants in Si for shallow junctions 2002 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tomita, M. oth Murakoshi, A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 190(2002), Seite 552-555 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:190 year:2002 pages:552-555 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_31 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_4082 GBV_ILN_4266 GBV_ILN_4700 UA 5680. AR 190 2002 552-555 4
allfieldsGer	SW020610 (DE-627)OLC1625005075 (DE-599)GBVOLC1625005075 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Suzuki, M. verfasserin aut Application of NRA to evaluation of boron implants in Si for shallow junctions 2002 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tomita, M. oth Murakoshi, A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 190(2002), Seite 552-555 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:190 year:2002 pages:552-555 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_31 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_4082 GBV_ILN_4266 GBV_ILN_4700 UA 5680. AR 190 2002 552-555 4
allfieldsSound	SW020610 (DE-627)OLC1625005075 (DE-599)GBVOLC1625005075 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Suzuki, M. verfasserin aut Application of NRA to evaluation of boron implants in Si for shallow junctions 2002 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Tomita, M. oth Murakoshi, A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 190(2002), Seite 552-555 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:190 year:2002 pages:552-555 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_31 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_4082 GBV_ILN_4266 GBV_ILN_4700 UA 5680. AR 190 2002 552-555 4
source	Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 190(2002), Seite 552-555 volume:190 year:2002 pages:552-555 extent:4
sourceStr	Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 190(2002), Seite 552-555 volume:190 year:2002 pages:552-555 extent:4
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	530
isfreeaccess_bool	false
container_title	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
authorswithroles_txt_mv	Suzuki, M. @@aut@@ Tomita, M. @@oth@@ Murakoshi, A. @@oth@@
publishDateDaySort_date	2002-01-01T00:00:00Z
hierarchy_top_id	129862266
dewey-sort	3530
id	OLC1625005075
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1625005075</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230706153237.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">020610s2002 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW020610</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1625005075</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1625005075</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 5680.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Suzuki, M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Application of NRA to evaluation of boron implants in Si for shallow junctions</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">4</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tomita, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Murakoshi, A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</subfield><subfield code="d">Amsterdam [u.a.] : Elsevier, 1984</subfield><subfield code="g">190(2002), Seite 552-555</subfield><subfield code="w">(DE-627)129862266</subfield><subfield code="w">(DE-600)283666-X</subfield><subfield code="w">(DE-576)015173690</subfield><subfield code="x">0168-583X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:190</subfield><subfield code="g">year:2002</subfield><subfield code="g">pages:552-555</subfield><subfield code="g">extent:4</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 5680.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">190</subfield><subfield code="j">2002</subfield><subfield code="h">552-555</subfield><subfield code="g">4</subfield></datafield></record></collection>
author	Suzuki, M.
spellingShingle	Suzuki, M. ddc 530 rvk UA 5680. Application of NRA to evaluation of boron implants in Si for shallow junctions
authorStr	Suzuki, M.
ppnlink_with_tag_str_mv	@@773@@(DE-627)129862266
format	Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0168-583X
topic_title	530 UA 5680. AVZ rvk Application of NRA to evaluation of boron implants in Si for shallow junctions
topic	ddc 530 rvk UA 5680.
topic_unstemmed	ddc 530 rvk UA 5680.
topic_browse	ddc 530 rvk UA 5680.
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	m t mt a m am
hierarchy_parent_title	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
hierarchy_parent_id	129862266
dewey-tens	530 - Physics
hierarchy_top_title	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)129862266 (DE-600)283666-X (DE-576)015173690
title	Application of NRA to evaluation of boron implants in Si for shallow junctions
ctrlnum	(DE-627)OLC1625005075 (DE-599)GBVOLC1625005075
title_full	Application of NRA to evaluation of boron implants in Si for shallow junctions
author_sort	Suzuki, M.
journal	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
journalStr	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	2002
contenttype_str_mv	txt
container_start_page	552
author_browse	Suzuki, M.
container_volume	190
physical	4
class	530 UA 5680. AVZ rvk
format_se	Aufsätze
author-letter	Suzuki, M.
dewey-full	530
title_sort	application of nra to evaluation of boron implants in si for shallow junctions
title_auth	Application of NRA to evaluation of boron implants in Si for shallow junctions
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_31 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_4082 GBV_ILN_4266 GBV_ILN_4700
title_short	Application of NRA to evaluation of boron implants in Si for shallow junctions
remote_bool	false
author2	Tomita, M. Murakoshi, A.
author2Str	Tomita, M. Murakoshi, A.
ppnlink	129862266
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth
up_date	2024-07-04T00:07:00.507Z
_version_	1803604848026845184
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1625005075</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230706153237.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">020610s2002 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW020610</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1625005075</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1625005075</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 5680.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Suzuki, M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Application of NRA to evaluation of boron implants in Si for shallow junctions</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">4</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tomita, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Murakoshi, A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</subfield><subfield code="d">Amsterdam [u.a.] : Elsevier, 1984</subfield><subfield code="g">190(2002), Seite 552-555</subfield><subfield code="w">(DE-627)129862266</subfield><subfield code="w">(DE-600)283666-X</subfield><subfield code="w">(DE-576)015173690</subfield><subfield code="x">0168-583X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:190</subfield><subfield code="g">year:2002</subfield><subfield code="g">pages:552-555</subfield><subfield code="g">extent:4</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 5680.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">190</subfield><subfield code="j">2002</subfield><subfield code="h">552-555</subfield><subfield code="g">4</subfield></datafield></record></collection>
score	7.4004965

Nicht das Richtige dabei?

Schreiben Sie uns!

Application of NRA to evaluation of boron implants in Si for shallow junctions

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?