Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics

Gespeichert in:

Autor*in:	Kono, A. [verfasserIn] Funahashi, H.

Format:	Artikel

Erschienen:	2002

Umfang:	7

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 92(2002), 4, Seite 1757-1763
Übergeordnetes Werk:	volume:92 ; year:2002 ; number:4 ; pages:1757-1763 ; extent:7

Katalog-ID:	OLC1627777504

Internformat


LEADER	01000caa a22002652 4500
001	OLC1627777504
003	DE-627
005	20230706164103.0
007	tu
008	020805s2002 xx \|\|\|\|\| 00\| \|\|und c
028	5	2	\|a SW020802
035			\|a (DE-627)OLC1627777504
035			\|a (DE-599)GBVOLC1627777504
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 530
100	1		\|a Kono, A. \|e verfasserin \|4 aut
245	1	0	\|a Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
264		1	\|c 2002
300			\|a 7
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Funahashi, H. \|4 oth
773	0	8	\|i Enthalten in \|t Journal of applied physics \|d Melville, NY : AIP, 1937 \|g 92(2002), 4, Seite 1757-1763 \|w (DE-627)129079030 \|w (DE-600)3112-4 \|w (DE-576)014411652 \|x 0021-8979 \|7 nnns
773	1	8	\|g volume:92 \|g year:2002 \|g number:4 \|g pages:1757-1763 \|g extent:7
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-PHY
912			\|a GBV_ILN_11
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_30
912			\|a GBV_ILN_31
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_59
912			\|a GBV_ILN_62
912			\|a GBV_ILN_70
912			\|a GBV_ILN_130
912			\|a GBV_ILN_170
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2010
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2027
912			\|a GBV_ILN_2185
912			\|a GBV_ILN_2279
912			\|a GBV_ILN_2409
912			\|a GBV_ILN_4082
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4310
912			\|a GBV_ILN_4313
912			\|a GBV_ILN_4318
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4323
912			\|a GBV_ILN_4700
951			\|a AR
952			\|d 92 \|j 2002 \|e 4 \|h 1757-1763 \|g 7

Indexfelder

author_variant	a k ak
matchkey_str	article:00218979:2002----::hmosatrnosrainfomxelaeetoeegdsrbtoiidcieyopecfaadfapamsntefetfir
hierarchy_sort_str	2002
publishDate	2002
allfields	SW020802 (DE-627)OLC1627777504 (DE-599)GBVOLC1627777504 DE-627 ger DE-627 rakwb 530 Kono, A. verfasserin aut Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics 2002 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Funahashi, H. oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 92(2002), 4, Seite 1757-1763 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:92 year:2002 number:4 pages:1757-1763 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 92 2002 4 1757-1763 7
spelling	SW020802 (DE-627)OLC1627777504 (DE-599)GBVOLC1627777504 DE-627 ger DE-627 rakwb 530 Kono, A. verfasserin aut Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics 2002 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Funahashi, H. oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 92(2002), 4, Seite 1757-1763 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:92 year:2002 number:4 pages:1757-1763 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 92 2002 4 1757-1763 7
allfields_unstemmed	SW020802 (DE-627)OLC1627777504 (DE-599)GBVOLC1627777504 DE-627 ger DE-627 rakwb 530 Kono, A. verfasserin aut Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics 2002 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Funahashi, H. oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 92(2002), 4, Seite 1757-1763 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:92 year:2002 number:4 pages:1757-1763 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 92 2002 4 1757-1763 7
allfieldsGer	SW020802 (DE-627)OLC1627777504 (DE-599)GBVOLC1627777504 DE-627 ger DE-627 rakwb 530 Kono, A. verfasserin aut Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics 2002 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Funahashi, H. oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 92(2002), 4, Seite 1757-1763 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:92 year:2002 number:4 pages:1757-1763 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 92 2002 4 1757-1763 7
allfieldsSound	SW020802 (DE-627)OLC1627777504 (DE-599)GBVOLC1627777504 DE-627 ger DE-627 rakwb 530 Kono, A. verfasserin aut Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics 2002 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Funahashi, H. oth Enthalten in Journal of applied physics Melville, NY : AIP, 1937 92(2002), 4, Seite 1757-1763 (DE-627)129079030 (DE-600)3112-4 (DE-576)014411652 0021-8979 nnns volume:92 year:2002 number:4 pages:1757-1763 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 92 2002 4 1757-1763 7
source	Enthalten in Journal of applied physics 92(2002), 4, Seite 1757-1763 volume:92 year:2002 number:4 pages:1757-1763 extent:7
sourceStr	Enthalten in Journal of applied physics 92(2002), 4, Seite 1757-1763 volume:92 year:2002 number:4 pages:1757-1763 extent:7
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	530
isfreeaccess_bool	false
container_title	Journal of applied physics
authorswithroles_txt_mv	Kono, A. @@aut@@ Funahashi, H. @@oth@@
publishDateDaySort_date	2002-01-01T00:00:00Z
hierarchy_top_id	129079030
dewey-sort	3530
id	OLC1627777504
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1627777504</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230706164103.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">020805s2002 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW020802</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1627777504</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1627777504</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kono, A.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">7</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Funahashi, H.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of applied physics</subfield><subfield code="d">Melville, NY : AIP, 1937</subfield><subfield code="g">92(2002), 4, Seite 1757-1763</subfield><subfield code="w">(DE-627)129079030</subfield><subfield code="w">(DE-600)3112-4</subfield><subfield code="w">(DE-576)014411652</subfield><subfield code="x">0021-8979</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:92</subfield><subfield code="g">year:2002</subfield><subfield code="g">number:4</subfield><subfield code="g">pages:1757-1763</subfield><subfield code="g">extent:7</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_59</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2279</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2409</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4310</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4318</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">92</subfield><subfield code="j">2002</subfield><subfield code="e">4</subfield><subfield code="h">1757-1763</subfield><subfield code="g">7</subfield></datafield></record></collection>
author	Kono, A.
spellingShingle	Kono, A. ddc 530 Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
authorStr	Kono, A.
ppnlink_with_tag_str_mv	@@773@@(DE-627)129079030
format	Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0021-8979
topic_title	530 Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
topic	ddc 530
topic_unstemmed	ddc 530
topic_browse	ddc 530
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	h f hf
hierarchy_parent_title	Journal of applied physics
hierarchy_parent_id	129079030
dewey-tens	530 - Physics
hierarchy_top_title	Journal of applied physics
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)129079030 (DE-600)3112-4 (DE-576)014411652
title	Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
ctrlnum	(DE-627)OLC1627777504 (DE-599)GBVOLC1627777504
title_full	Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
author_sort	Kono, A.
journal	Journal of applied physics
journalStr	Journal of applied physics
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	2002
contenttype_str_mv	txt
container_start_page	1757
author_browse	Kono, A.
container_volume	92
physical	7
class	530
format_se	Aufsätze
author-letter	Kono, A.
dewey-full	530
title_sort	thomson-scattering observation of non-maxwellian electron energy distribution in inductively coupled c4f8-ar and cf4-ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
title_auth	Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_32 GBV_ILN_40 GBV_ILN_59 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_2185 GBV_ILN_2279 GBV_ILN_2409 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700
container_issue	4
title_short	Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics
remote_bool	false
author2	Funahashi, H.
author2Str	Funahashi, H.
ppnlink	129079030
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth
up_date	2024-07-03T18:00:46.110Z
_version_	1803581806201536512
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1627777504</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230706164103.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">020805s2002 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">SW020802</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1627777504</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1627777504</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kono, A.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">7</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Funahashi, H.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Journal of applied physics</subfield><subfield code="d">Melville, NY : AIP, 1937</subfield><subfield code="g">92(2002), 4, Seite 1757-1763</subfield><subfield code="w">(DE-627)129079030</subfield><subfield code="w">(DE-600)3112-4</subfield><subfield code="w">(DE-576)014411652</subfield><subfield code="x">0021-8979</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:92</subfield><subfield code="g">year:2002</subfield><subfield code="g">number:4</subfield><subfield code="g">pages:1757-1763</subfield><subfield code="g">extent:7</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_59</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2027</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2279</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2409</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4310</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4318</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">92</subfield><subfield code="j">2002</subfield><subfield code="e">4</subfield><subfield code="h">1757-1763</subfield><subfield code="g">7</subfield></datafield></record></collection>
score	7.3996735

Nicht das Richtige dabei?

Schreiben Sie uns!

Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C4F8-Ar and CF4-Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?