Impact of technology scaling on thermal behavior of leakage current in sub-quarter micron MOSFETs: perspective of low temperature current testing

Gespeichert in:

Autor*in:	Semenov, Oleg [verfasserIn] Vassighi, Arman Sachdev, Manoj

Format:	Artikel

Erschienen:	2002

Umfang:	10

Übergeordnetes Werk:	Enthalten in: Microelectronics journal - Oxford : Elsevier Advanced Technology, 1978, 33(2002), 11, Seite 985-994
Übergeordnetes Werk:	volume:33 ; year:2002 ; number:11 ; pages:985-994 ; extent:10

Katalog-ID:	OLC1636983022

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Impact of technology scaling on thermal behavior of leakage current in sub-quarter micron MOSFETs: perspective of low temperature current testing

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