Surface nanostructuring of silicon

Gespeichert in:

Autor*in:	Pedraza, A.J. [verfasserIn] Fowlkes, J.D. Guan, Y.-F.

Format:	Artikel

Erschienen:	2003

Systematik:	UA 9001.

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Applied physics. A, Materials science & processing - Berlin : Springer, 1981, 77(2003), 2, Seite 277-284
Übergeordnetes Werk:	volume:77 ; year:2003 ; number:2 ; pages:277-284 ; extent:8

Katalog-ID:	OLC1644241285

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Surface nanostructuring of silicon

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