A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

Gespeichert in:

Autor*in:	Pfeiffer, K. [verfasserIn] Reuther, F. Fink, M. Gruetzner, G. Carlberg, P. Maximov, I. Montelius, L. Seekamp, J. Zankovych, S.

Format:	Artikel

Erschienen:	2003

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 67(2003), Seite 266-273
Übergeordnetes Werk:	volume:67 ; year:2003 ; pages:266-273 ; extent:8

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allfields	sw030630 (DE-627)OLC164546945X (DE-599)GBVOLC164546945X DE-627 ger DE-627 rakwb 620 53.51 bkl 53.56 bkl 53.52 bkl 50.94 bkl Pfeiffer, K. verfasserin aut A comparison of thermally and photochemically cross-linked polymers for nanoimprinting 2003 8 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Reuther, F. oth Fink, M. oth Gruetzner, G. oth Carlberg, P. oth Maximov, I. oth Montelius, L. oth Seekamp, J. oth Zankovych, S. oth Enthalten in Microelectronic engineering Amsterdam [u.a.] : Elsevier, 1983 67(2003), Seite 266-273 (DE-627)130400688 (DE-600)605230-7 (DE-576)015903680 0167-9317 nnns volume:67 year:2003 pages:266-273 extent:8 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_4316 53.51 AVZ 53.56 AVZ 53.52 AVZ 50.94 AVZ AR 67 2003 266-273 8
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allfieldsGer	sw030630 (DE-627)OLC164546945X (DE-599)GBVOLC164546945X DE-627 ger DE-627 rakwb 620 53.51 bkl 53.56 bkl 53.52 bkl 50.94 bkl Pfeiffer, K. verfasserin aut A comparison of thermally and photochemically cross-linked polymers for nanoimprinting 2003 8 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Reuther, F. oth Fink, M. oth Gruetzner, G. oth Carlberg, P. oth Maximov, I. oth Montelius, L. oth Seekamp, J. oth Zankovych, S. oth Enthalten in Microelectronic engineering Amsterdam [u.a.] : Elsevier, 1983 67(2003), Seite 266-273 (DE-627)130400688 (DE-600)605230-7 (DE-576)015903680 0167-9317 nnns volume:67 year:2003 pages:266-273 extent:8 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_4316 53.51 AVZ 53.56 AVZ 53.52 AVZ 50.94 AVZ AR 67 2003 266-273 8
allfieldsSound	sw030630 (DE-627)OLC164546945X (DE-599)GBVOLC164546945X DE-627 ger DE-627 rakwb 620 53.51 bkl 53.56 bkl 53.52 bkl 50.94 bkl Pfeiffer, K. verfasserin aut A comparison of thermally and photochemically cross-linked polymers for nanoimprinting 2003 8 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Reuther, F. oth Fink, M. oth Gruetzner, G. oth Carlberg, P. oth Maximov, I. oth Montelius, L. oth Seekamp, J. oth Zankovych, S. oth Enthalten in Microelectronic engineering Amsterdam [u.a.] : Elsevier, 1983 67(2003), Seite 266-273 (DE-627)130400688 (DE-600)605230-7 (DE-576)015903680 0167-9317 nnns volume:67 year:2003 pages:266-273 extent:8 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_32 GBV_ILN_70 GBV_ILN_150 GBV_ILN_2002 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_4316 53.51 AVZ 53.56 AVZ 53.52 AVZ 50.94 AVZ AR 67 2003 266-273 8
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A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

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