A comparison of thermally and photochemically cross-linked polymers for nanoimprinting
Autor*in: |
Pfeiffer, K. [verfasserIn] |
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Format: |
Artikel |
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Erschienen: |
2003 |
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Umfang: |
8 |
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Übergeordnetes Werk: |
Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 67(2003), Seite 266-273 |
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Übergeordnetes Werk: |
volume:67 ; year:2003 ; pages:266-273 ; extent:8 |
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