Fluorescence microscopy for quality control in nanoimprint lithography
Autor*in: |
Finder, Ch [verfasserIn] |
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Artikel |
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Erschienen: |
2003 |
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Umfang: |
6 |
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Übergeordnetes Werk: |
Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 67(2003), Seite 623-628 |
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volume:67 ; year:2003 ; pages:623-628 ; extent:6 |
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