Semiconductor material analysis based on microcalorimeter EDS

Gespeichert in:

Autor*in:	Simmnacher, B. [verfasserIn] Weiland, R. Höhne, J. Feilitzsch, F.v. Hollerith, C.

Format:	Artikel

Erschienen:	2003

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Microelectronics reliability - Amsterdam [u.a.] : Elsevier, 1964, 43(2003), 9, Seite 1675-1680
Übergeordnetes Werk:	volume:43 ; year:2003 ; number:9 ; pages:1675-1680 ; extent:6

Katalog-ID:	OLC1649715641

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