Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators

Gespeichert in:

Autor*in:	Zhou, Guangya [verfasserIn] Dowd, Philip

Format:	Artikel

Erschienen:	2003

Umfang:	6

Übergeordnetes Werk:	Enthalten in: Journal of micromechanics and microengineering - Bristol : IOP Publ., 1991, 13(2003), 2, Seite 178-183
Übergeordnetes Werk:	volume:13 ; year:2003 ; number:2 ; pages:178-183 ; extent:6

Katalog-ID:	OLC1650210388

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