Growth model for thin oxides and oxide optimization

Gespeichert in:

Autor*in:	Ludsteck, A. [verfasserIn] Schulze, J. Eisele, I. Dietl, W. Nenyei, Z.

Format:	Artikel

Erschienen:	2004

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 95(2004), 5, Seite 2827-2831
Übergeordnetes Werk:	volume:95 ; year:2004 ; number:5 ; pages:2827-2831 ; extent:5

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