Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser

Gespeichert in:

Autor*in:	Gu, E. [verfasserIn] Jeon, C.W. Choi, H.W. Rice, G. Dawson, M.D. Illy, E.K. Knowles, M.R.H.

Format:	Artikel

Erschienen:	2004

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Thin solid films - Amsterdam [u.a.] Elsevier, 1967, 453(2004), 1, Seite 462-466
Übergeordnetes Werk:	volume:453 ; year:2004 ; number:1 ; pages:462-466 ; extent:5

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