AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection
Gespeichert in:
| Autor*in: |
Villarroya, María [verfasserIn] |
|---|
| Format: |
Artikel |
|---|
| Erschienen: |
2004 |
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| Umfang: |
6 |
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| Übergeordnetes Werk: |
Enthalten in: Nanotechnology - Bristol : IOP Publishing Ltd., 1990, 15(2004), 7, Seite 771-776 |
|---|---|
| Übergeordnetes Werk: |
volume:15 ; year:2004 ; number:7 ; pages:771-776 ; extent:6 |
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7.4012003 |