Planarization and Dielectric Properties of Thin Photosensitive and Nonphotosensitive BCB
Gespeichert in:
| Autor*in: |
Dusch, B. [verfasserIn] |
|---|
| Format: |
Artikel |
|---|
| Erschienen: |
2004 |
|---|
| Umfang: |
6 |
|---|
| Übergeordnetes Werk: |
Enthalten in: Journal of microelectronics and electronic packaging - Washington, DC : IMAPS, 2004, 1(2004), 2, Seite 47-52 |
|---|---|
| Übergeordnetes Werk: |
volume:1 ; year:2004 ; number:2 ; pages:47-52 ; extent:6 |
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