Mask-free photolithographic exposure using a matrix-addressable micropixellated AlInGaN ultraviolet light-emitting diode

Gespeichert in:

Autor*in:	Jeon, C.W. [verfasserIn] Gu, E. Dawson, M.D.

Format:	Artikel

Erschienen:	2005

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Applied physics letters - Melville, NY : AIP, 1962, 86(2005), 22, Seite 221105
Übergeordnetes Werk:	volume:86 ; year:2005 ; number:22 ; pages:221105 ; extent:1

Katalog-ID:	OLC1673960650

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Mask-free photolithographic exposure using a matrix-addressable micropixellated AlInGaN ultraviolet light-emitting diode

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