Micro-gravity capacitive silicon-on-insulator accelerometers

Gespeichert in:

Autor*in:	Vakili Amini, Babak [verfasserIn] Ayazi, Farrokh

Format:	Artikel

Erschienen:	2005

Umfang:	8

Übergeordnetes Werk:	Enthalten in: Journal of micromechanics and microengineering - Bristol : IOP Publ., 1991, 15(2005), 11, Seite 2113-2120
Übergeordnetes Werk:	volume:15 ; year:2005 ; number:11 ; pages:2113-2120 ; extent:8

Katalog-ID:	OLC168135134X

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