Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses

Gespeichert in:

Autor*in:	Vanzetti, L. [verfasserIn] Barozzi, M. Giubertoni, D. Kompocholis, C. Bagolini, A. Bellutti, P.

Format:	Artikel

Erschienen:	2006

Systematik:	ZG 1100:

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Surface and interface analysis - Chichester [u.a.] : Wiley, 1979, 38(2006), 4, Seite 723-726
Übergeordnetes Werk:	volume:38 ; year:2006 ; number:4 ; pages:723-726 ; extent:4

Katalog-ID:	OLC1695904516

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allfields	sw060412 (DE-627)OLC1695904516 (DE-599)GBVOLC1695904516 DE-627 ger DE-627 rakwb 540 530 ZG 1100: AVZ rvk 51.00 bkl 33.68 bkl Vanzetti, L. verfasserin aut Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Barozzi, M. oth Giubertoni, D. oth Kompocholis, C. oth Bagolini, A. oth Bellutti, P. oth Enthalten in Surface and interface analysis Chichester [u.a.] : Wiley, 1979 38(2006), 4, Seite 723-726 (DE-627)129377104 (DE-600)164045-8 (DE-576)01475908X 0142-2421 nnns volume:38 year:2006 number:4 pages:723-726 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_70 GBV_ILN_4266 ZG 1100: 51.00 AVZ 33.68 AVZ AR 38 2006 4 723-726 4
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allfieldsSound	sw060412 (DE-627)OLC1695904516 (DE-599)GBVOLC1695904516 DE-627 ger DE-627 rakwb 540 530 ZG 1100: AVZ rvk 51.00 bkl 33.68 bkl Vanzetti, L. verfasserin aut Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Barozzi, M. oth Giubertoni, D. oth Kompocholis, C. oth Bagolini, A. oth Bellutti, P. oth Enthalten in Surface and interface analysis Chichester [u.a.] : Wiley, 1979 38(2006), 4, Seite 723-726 (DE-627)129377104 (DE-600)164045-8 (DE-576)01475908X 0142-2421 nnns volume:38 year:2006 number:4 pages:723-726 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OLC-CHE SSG-OLC-PHA SSG-OLC-DE-84 GBV_ILN_70 GBV_ILN_4266 ZG 1100: 51.00 AVZ 33.68 AVZ AR 38 2006 4 723-726 4
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title_short	Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses
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