Radio-frequency magnetron sputtering of pure and mixed targets of Li4SiO4, Li3PO4, and Li2O

Gespeichert in:

Autor*in:	Dudney, N.J. [verfasserIn] Bates, J.B. Robertson, J.D.

Format:	Artikel

Erschienen:	1993

Systematik:	UA 4921

Umfang:	13

Übergeordnetes Werk:	Enthalten in: Journal of vacuum science and technology / A - New York, NY : Inst., 1983, 11(1993), 2, Seite 377-389
Übergeordnetes Werk:	volume:11 ; year:1993 ; number:2 ; pages:377-389 ; extent:13

Katalog-ID:	OLC1701098989

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author-letter	Dudney, N.J.
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title_sort	radio-frequency magnetron sputtering of pure and mixed targets of li4sio4, li3po4, and li2o
title_auth	Radio-frequency magnetron sputtering of pure and mixed targets of Li4SiO4, Li3PO4, and Li2O
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title_short	Radio-frequency magnetron sputtering of pure and mixed targets of Li4SiO4, Li3PO4, and Li2O
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author2	Bates, J.B. Robertson, J.D.
author2Str	Bates, J.B. Robertson, J.D.
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up_date	2024-07-03T16:27:08.216Z
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Radio-frequency magnetron sputtering of pure and mixed targets of Li4SiO4, Li3PO4, and Li2O

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