Raman characterization of SOI-SIMOX structures

Gespeichert in:

Autor*in:	Martin, E. [verfasserIn] Jiménez, J. Pérez-Rodrigues, A. Morante, J.R.

Format:	Artikel

Erschienen:	1993

Umfang:	5

Übergeordnetes Werk:	Enthalten in: Materials letters - New York, NY [u.a.] : Elsevier, 1982, 15(1993), 1-2, Seite 122-126
Übergeordnetes Werk:	volume:15 ; year:1993 ; number:1-2 ; pages:122-126 ; extent:5

Katalog-ID:	OLC1707289034

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