Role of Fluorine in Reactive Ion Etching of Silicon Dioxide

Gespeichert in:

Autor*in:	Ikegami, Naokatsu [verfasserIn] Miyakawa, Yasuhiro Hashimoto, Jun Ozawa, Nobuo Kanamori, Jun

Format:	Artikel

Erschienen:	1993

Systematik:	UA 4210.

Umfang:	7

Übergeordnetes Werk:	Enthalten in: Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers - Tokyo : Ōyō Butsuri Gakkai, 1982, 32(1993), 12, B, Seite 6088-6094
Übergeordnetes Werk:	volume:32 ; year:1993 ; number:12 ; supplement:B ; pages:6088-6094 ; extent:7

Katalog-ID:	OLC170824588X

Internformat


LEADER	01000caa a22002652 4500
001	OLC170824588X
003	DE-627
005	20230708120633.0
007	tu
008	950721s1993 xx \|\|\|\|\| 00\| \|\|und c
035			\|a (DE-627)OLC170824588X
035			\|a (DE-599)GBVOLC170824588X
040			\|a DE-627 \|b ger \|c DE-627 \|e rakwb
082	0	4	\|a 530
084			\|a UA 4210. \|q AVZ \|2 rvk
100	1		\|a Ikegami, Naokatsu \|e verfasserin \|4 aut
245	1	0	\|a Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
264		1	\|c 1993
300			\|a 7
336			\|a Text \|b txt \|2 rdacontent
337			\|a ohne Hilfsmittel zu benutzen \|b n \|2 rdamedia
338			\|a Band \|b nc \|2 rdacarrier
700	1		\|a Miyakawa, Yasuhiro \|4 oth
700	1		\|a Hashimoto, Jun \|4 oth
700	1		\|a Ozawa, Nobuo \|4 oth
700	1		\|a Kanamori, Jun \|4 oth
773	0	8	\|i Enthalten in \|t Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers \|d Tokyo : Ōyō Butsuri Gakkai, 1982 \|g 32(1993), 12, B, Seite 6088-6094 \|w (DE-627)130626937 \|w (DE-600)797294-5 \|w (DE-576)016133269 \|x 0021-4922 \|7 nnns
773	1	8	\|g volume:32 \|g year:1993 \|g number:12 \|g supplement:B \|g pages:6088-6094 \|g extent:7
912			\|a GBV_USEFLAG_A
912			\|a SYSFLAG_A
912			\|a GBV_OLC
912			\|a SSG-OLC-PHY
912			\|a GBV_ILN_20
912			\|a GBV_ILN_22
912			\|a GBV_ILN_23
912			\|a GBV_ILN_30
912			\|a GBV_ILN_32
912			\|a GBV_ILN_40
912			\|a GBV_ILN_62
912			\|a GBV_ILN_70
912			\|a GBV_ILN_100
912			\|a GBV_ILN_130
912			\|a GBV_ILN_170
912			\|a GBV_ILN_2001
912			\|a GBV_ILN_2004
912			\|a GBV_ILN_2006
912			\|a GBV_ILN_2007
912			\|a GBV_ILN_2010
912			\|a GBV_ILN_2014
912			\|a GBV_ILN_2015
912			\|a GBV_ILN_2020
912			\|a GBV_ILN_2021
912			\|a GBV_ILN_2185
912			\|a GBV_ILN_4036
912			\|a GBV_ILN_4037
912			\|a GBV_ILN_4082
912			\|a GBV_ILN_4116
912			\|a GBV_ILN_4126
912			\|a GBV_ILN_4266
912			\|a GBV_ILN_4305
912			\|a GBV_ILN_4306
912			\|a GBV_ILN_4307
912			\|a GBV_ILN_4314
912			\|a GBV_ILN_4315
912			\|a GBV_ILN_4317
912			\|a GBV_ILN_4319
912			\|a GBV_ILN_4700
936	r	v	\|a UA 4210.
951			\|a AR
952			\|d 32 \|j 1993 \|e 12 \|f B \|h 6088-6094 \|g 7

Indexfelder

author_variant	n i ni
matchkey_str	article:00214922:1993----::oefloienecieoecigf
hierarchy_sort_str	1993
publishDate	1993
allfields	(DE-627)OLC170824588X (DE-599)GBVOLC170824588X DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Ikegami, Naokatsu verfasserin aut Role of Fluorine in Reactive Ion Etching of Silicon Dioxide 1993 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Miyakawa, Yasuhiro oth Hashimoto, Jun oth Ozawa, Nobuo oth Kanamori, Jun oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 32(1993), 12, B, Seite 6088-6094 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4082 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4317 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 32 1993 12 B 6088-6094 7
spelling	(DE-627)OLC170824588X (DE-599)GBVOLC170824588X DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Ikegami, Naokatsu verfasserin aut Role of Fluorine in Reactive Ion Etching of Silicon Dioxide 1993 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Miyakawa, Yasuhiro oth Hashimoto, Jun oth Ozawa, Nobuo oth Kanamori, Jun oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 32(1993), 12, B, Seite 6088-6094 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4082 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4317 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 32 1993 12 B 6088-6094 7
allfields_unstemmed	(DE-627)OLC170824588X (DE-599)GBVOLC170824588X DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Ikegami, Naokatsu verfasserin aut Role of Fluorine in Reactive Ion Etching of Silicon Dioxide 1993 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Miyakawa, Yasuhiro oth Hashimoto, Jun oth Ozawa, Nobuo oth Kanamori, Jun oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 32(1993), 12, B, Seite 6088-6094 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4082 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4317 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 32 1993 12 B 6088-6094 7
allfieldsGer	(DE-627)OLC170824588X (DE-599)GBVOLC170824588X DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Ikegami, Naokatsu verfasserin aut Role of Fluorine in Reactive Ion Etching of Silicon Dioxide 1993 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Miyakawa, Yasuhiro oth Hashimoto, Jun oth Ozawa, Nobuo oth Kanamori, Jun oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 32(1993), 12, B, Seite 6088-6094 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4082 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4317 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 32 1993 12 B 6088-6094 7
allfieldsSound	(DE-627)OLC170824588X (DE-599)GBVOLC170824588X DE-627 ger DE-627 rakwb 530 UA 4210. AVZ rvk Ikegami, Naokatsu verfasserin aut Role of Fluorine in Reactive Ion Etching of Silicon Dioxide 1993 7 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Miyakawa, Yasuhiro oth Hashimoto, Jun oth Ozawa, Nobuo oth Kanamori, Jun oth Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers Tokyo : Ōyō Butsuri Gakkai, 1982 32(1993), 12, B, Seite 6088-6094 (DE-627)130626937 (DE-600)797294-5 (DE-576)016133269 0021-4922 nnns volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4082 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4317 GBV_ILN_4319 GBV_ILN_4700 UA 4210. AR 32 1993 12 B 6088-6094 7
source	Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers 32(1993), 12, B, Seite 6088-6094 volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7
sourceStr	Enthalten in Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers 32(1993), 12, B, Seite 6088-6094 volume:32 year:1993 number:12 supplement:B pages:6088-6094 extent:7
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	530
isfreeaccess_bool	false
container_title	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
authorswithroles_txt_mv	Ikegami, Naokatsu @@aut@@ Miyakawa, Yasuhiro @@oth@@ Hashimoto, Jun @@oth@@ Ozawa, Nobuo @@oth@@ Kanamori, Jun @@oth@@
publishDateDaySort_date	1993-01-01T00:00:00Z
hierarchy_top_id	130626937
dewey-sort	3530
id	OLC170824588X
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC170824588X</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230708120633.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">950721s1993 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC170824588X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC170824588X</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 4210.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ikegami, Naokatsu</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Role of Fluorine in Reactive Ion Etching of Silicon Dioxide</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">7</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Miyakawa, Yasuhiro</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hashimoto, Jun</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ozawa, Nobuo</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kanamori, Jun</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers</subfield><subfield code="d">Tokyo : Ōyō Butsuri Gakkai, 1982</subfield><subfield code="g">32(1993), 12, B, Seite 6088-6094</subfield><subfield code="w">(DE-627)130626937</subfield><subfield code="w">(DE-600)797294-5</subfield><subfield code="w">(DE-576)016133269</subfield><subfield code="x">0021-4922</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:32</subfield><subfield code="g">year:1993</subfield><subfield code="g">number:12</subfield><subfield code="g">supplement:B</subfield><subfield code="g">pages:6088-6094</subfield><subfield code="g">extent:7</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2001</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4314</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4315</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4317</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 4210.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">32</subfield><subfield code="j">1993</subfield><subfield code="e">12</subfield><subfield code="f">B</subfield><subfield code="h">6088-6094</subfield><subfield code="g">7</subfield></datafield></record></collection>
author	Ikegami, Naokatsu
spellingShingle	Ikegami, Naokatsu ddc 530 rvk UA 4210. Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
authorStr	Ikegami, Naokatsu
ppnlink_with_tag_str_mv	@@773@@(DE-627)130626937
format	Article
dewey-ones	530 - Physics
delete_txt_mv	keep
author_role	aut
collection	OLC
remote_str	false
illustrated	Not Illustrated
issn	0021-4922
topic_title	530 UA 4210. AVZ rvk Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
topic	ddc 530 rvk UA 4210.
topic_unstemmed	ddc 530 rvk UA 4210.
topic_browse	ddc 530 rvk UA 4210.
format_facet	Aufsätze Gedruckte Aufsätze
format_main_str_mv	Text Zeitschrift/Artikel
carriertype_str_mv	nc
author2_variant	y m ym j h jh n o no j k jk
hierarchy_parent_title	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
hierarchy_parent_id	130626937
dewey-tens	530 - Physics
hierarchy_top_title	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
isfreeaccess_txt	false
familylinks_str_mv	(DE-627)130626937 (DE-600)797294-5 (DE-576)016133269
title	Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
ctrlnum	(DE-627)OLC170824588X (DE-599)GBVOLC170824588X
title_full	Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
author_sort	Ikegami, Naokatsu
journal	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
journalStr	Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers
isOA_bool	false
dewey-hundreds	500 - Science
recordtype	marc
publishDateSort	1993
contenttype_str_mv	txt
container_start_page	6088
author_browse	Ikegami, Naokatsu
container_volume	32
physical	7
class	530 UA 4210. AVZ rvk
format_se	Aufsätze
author-letter	Ikegami, Naokatsu
dewey-full	530
title_sort	role of fluorine in reactive ion etching of silicon dioxide
title_auth	Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
collection_details	GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_70 GBV_ILN_100 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2001 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2010 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2185 GBV_ILN_4036 GBV_ILN_4037 GBV_ILN_4082 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4314 GBV_ILN_4315 GBV_ILN_4317 GBV_ILN_4319 GBV_ILN_4700
container_issue	12
title_short	Role of Fluorine in Reactive Ion Etching of Silicon Dioxide
remote_bool	false
author2	Miyakawa, Yasuhiro Hashimoto, Jun Ozawa, Nobuo Kanamori, Jun
author2Str	Miyakawa, Yasuhiro Hashimoto, Jun Ozawa, Nobuo Kanamori, Jun
ppnlink	130626937
mediatype_str_mv	n
isOA_txt	false
hochschulschrift_bool	false
author2_role	oth oth oth oth
up_date	2024-07-03T20:39:14.537Z
_version_	1803591776508837888
fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC170824588X</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230708120633.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">950721s1993 xx \|\|\|\|\| 00\| \|\|und c</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC170824588X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC170824588X</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 4210.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ikegami, Naokatsu</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Role of Fluorine in Reactive Ion Etching of Silicon Dioxide</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">7</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Miyakawa, Yasuhiro</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hashimoto, Jun</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ozawa, Nobuo</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kanamori, Jun</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Japanese journal of applied physics. Part 1, Regular papers, brief communications & review papers</subfield><subfield code="d">Tokyo : Ōyō Butsuri Gakkai, 1982</subfield><subfield code="g">32(1993), 12, B, Seite 6088-6094</subfield><subfield code="w">(DE-627)130626937</subfield><subfield code="w">(DE-600)797294-5</subfield><subfield code="w">(DE-576)016133269</subfield><subfield code="x">0021-4922</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:32</subfield><subfield code="g">year:1993</subfield><subfield code="g">number:12</subfield><subfield code="g">supplement:B</subfield><subfield code="g">pages:6088-6094</subfield><subfield code="g">extent:7</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_20</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_23</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_32</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_40</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_62</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_100</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2001</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2004</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2007</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2015</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4037</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4082</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4305</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4314</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4315</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4317</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4319</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4700</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 4210.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">32</subfield><subfield code="j">1993</subfield><subfield code="e">12</subfield><subfield code="f">B</subfield><subfield code="h">6088-6094</subfield><subfield code="g">7</subfield></datafield></record></collection>
score	7.3998795

Nicht das Richtige dabei?

Schreiben Sie uns!

Role of Fluorine in Reactive Ion Etching of Silicon Dioxide

Nicht das Richtige dabei?

Zugang & Verfügbarkeit

Vorhandene Bände

Nicht das Richtige dabei?