In-depth modifications of implanted amorphous carbon films

Gespeichert in:

Autor*in:	Freire Jr, F.L. [verfasserIn] Achete, C.A. Franceschini, D.F. Mariotto, G.

Format:	Artikel

Erschienen:	1994

Systematik:	UA 9001.

Übergeordnetes Werk:	Enthalten in: Applied physics. A, Materials science & processing - Berlin : Springer, 1981, 59(1994), 6, Seite 667
Übergeordnetes Werk:	volume:59 ; year:1994 ; number:6 ; pages:667

Katalog-ID:	OLC1709096861

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spelling	(DE-627)OLC1709096861 (DE-599)GBVOLC1709096861 DE-627 ger DE-627 rakwb 530 620 UA 9001. AVZ rvk Freire Jr, F.L. verfasserin aut In-depth modifications of implanted amorphous carbon films 1994 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Achete, C.A. oth Franceschini, D.F. oth Mariotto, G. oth Enthalten in Applied physics. A, Materials science & processing Berlin : Springer, 1981 59(1994), 6, Seite 667 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:59 year:1994 number:6 pages:667 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_105 GBV_ILN_121 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 9001. AR 59 1994 6 667
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In-depth modifications of implanted amorphous carbon films

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