Depth profile optimization

Gespeichert in:

Autor*in:	Naumkin, A.V. [verfasserIn] Vasilyev, L.A.

Format:	Artikel

Erschienen:	1994

Systematik:	UA 4921

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Journal of vacuum science and technology / A - New York, NY : Inst., 1983, 12(1994), 3, Seite 790-793
Übergeordnetes Werk:	volume:12 ; year:1994 ; number:3 ; pages:790-793 ; extent:4

Katalog-ID:	OLC1713279428

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score	7.4021635

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