Alkali-halogen plasma generation by dc magnetron discharge

Gespeichert in:

Autor*in:	Oohara, W. [verfasserIn] Nakahata, M. Hatakeyama, R.

Format:	Artikel

Erschienen:	2006

Umfang:	400

Übergeordnetes Werk:	Enthalten in: Applied physics letters - Melville, NY : AIP, 1962, 88(2006), 19, Seite 191501-191900
Übergeordnetes Werk:	volume:88 ; year:2006 ; number:19 ; pages:191501-191900 ; extent:400

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Alkali-halogen plasma generation by dc magnetron discharge

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