Arsenic uphill diffusion during shallow junction formation

Gespeichert in:

Autor*in:	Ferri, M. [verfasserIn] Solmi, S. Parisini, A. Bersani, M. Giubertoni, D. Barozzi, M.

Format:	Artikel

Erschienen:	2006

Umfang:	1

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 99(2006), 11, Seite 113508
Übergeordnetes Werk:	volume:99 ; year:2006 ; number:11 ; pages:113508 ; extent:1

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Arsenic uphill diffusion during shallow junction formation

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