Nondestructive dose determination and depth profiling of arsenic ultrashallow junctions with total reflection X-ray fluorescence analysis compared to dynamic secondary ion mass spectrometry
Gespeichert in:
| Autor*in: |
Pepponi, G. [verfasserIn] |
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| Format: |
Artikel |
|---|
| Erschienen: |
2004 |
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| Umfang: |
8 |
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| Übergeordnetes Werk: |
Enthalten in: Spectrochimica acta / B - Amsterdam [u.a.] : Elsevier, 1967, 59(2004), 8, Seite 1243-1250 |
|---|---|
| Übergeordnetes Werk: |
volume:59 ; year:2004 ; number:8 ; pages:1243-1250 ; extent:8 |
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