Charged particle densities and kinetics in a radio-frequency SF 6) plasma

Gespeichert in:

Autor*in:	Kono, A. [verfasserIn] Endo, M. Ohata, K. Kishimoto, S. Goto, T.

Format:	Artikel

Erschienen:	1994

Umfang:	10

Übergeordnetes Werk:	Enthalten in: Journal of applied physics - Melville, NY : AIP, 1937, 76(1994), 11, Seite 7221-7230
Übergeordnetes Werk:	volume:76 ; year:1994 ; number:11 ; pages:7221-7230 ; extent:10

Katalog-ID:	OLC1740544994

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Charged particle densities and kinetics in a radio-frequency SF 6) plasma

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