Dry etching and implantation characteristics of III-N alloys

Gespeichert in:

Autor*in:	Pearton, S.J. [verfasserIn] Vartuli, C.B. Shul, R.J. Zolper, J.C.

Format:	Artikel

Erschienen:	1995

Systematik:	VA 5950.

Umfang:	10

Übergeordnetes Werk:	Enthalten in: Materials science and engineering / B - Amsterdam [u.a.] : Elsevier, 1988, 31(1995), 3, Seite 309-318
Übergeordnetes Werk:	volume:31 ; year:1995 ; number:3 ; pages:309-318 ; extent:10

Katalog-ID:	OLC1748625837

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