Characterization of tantalum oxynitride thin films as high-temperature strain gauges

Gespeichert in:

Autor*in:	Ayerdi, I. [verfasserIn] Castaño, E. Garcia-Alonso, A. Gracia, F.J.

Format:	Artikel

Erschienen:	1995

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Sensors and actuators / A - Amsterdam [u.a.] : Elsevier, 1990, 46(1995), 1-3, Seite 218-221
Übergeordnetes Werk:	volume:46 ; year:1995 ; number:1-3 ; pages:218-221 ; extent:4

Katalog-ID:	OLC1749510170

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Characterization of tantalum oxynitride thin films as high-temperature strain gauges

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