An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing
Gespeichert in:
| Autor*in: |
Giubertoni, D. [verfasserIn] |
|---|
| Format: |
Artikel |
|---|
| Erschienen: |
2006 |
|---|
| Systematik: |
|
|---|
| Umfang: |
4 |
|---|
| Übergeordnetes Werk: |
Enthalten in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms - Amsterdam [u.a.] : Elsevier, 1984, 253(2006), 1, Seite 9-12 |
|---|---|
| Übergeordnetes Werk: |
volume:253 ; year:2006 ; number:1 ; pages:9-12 ; extent:4 |
| Katalog-ID: |
OLC1754902316 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC1754902316 | ||
| 003 | DE-627 | ||
| 005 | 20230710000327.0 | ||
| 007 | tu | ||
| 008 | 061214s2006 xx ||||| 00| ||und c | ||
| 028 | 5 | 2 | |a sw061214 |
| 035 | |a (DE-627)OLC1754902316 | ||
| 035 | |a (DE-599)GBVOLC1754902316 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 082 | 0 | 4 | |a 530 |
| 084 | |a UA 5680. |q AVZ |2 rvk | ||
| 100 | 1 | |a Giubertoni, D. |e verfasserin |4 aut | |
| 245 | 1 | 3 | |a An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| 264 | 1 | |c 2006 | |
| 300 | |a 4 | ||
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 700 | 1 | |a Pepponi, G. |4 oth | |
| 700 | 1 | |a Bersani, M. |4 oth | |
| 700 | 1 | |a Gennaro, S. |4 oth | |
| 700 | 1 | |a D’Acapito, F. |4 oth | |
| 700 | 1 | |a Doherty, R. |4 oth | |
| 700 | 1 | |a Foad, M.A. |4 oth | |
| 773 | 0 | 8 | |i Enthalten in |t Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |d Amsterdam [u.a.] : Elsevier, 1984 |g 253(2006), 1, Seite 9-12 |w (DE-627)129862266 |w (DE-600)283666-X |w (DE-576)015173690 |x 0168-583X |7 nnns |
| 773 | 1 | 8 | |g volume:253 |g year:2006 |g number:1 |g pages:9-12 |g extent:4 |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-PHY | ||
| 912 | |a GBV_ILN_11 | ||
| 912 | |a GBV_ILN_21 | ||
| 912 | |a GBV_ILN_31 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_170 | ||
| 912 | |a GBV_ILN_2006 | ||
| 912 | |a GBV_ILN_2014 | ||
| 912 | |a GBV_ILN_4266 | ||
| 912 | |a GBV_ILN_4307 | ||
| 936 | r | v | |a UA 5680. |
| 951 | |a AR | ||
| 952 | |d 253 |j 2006 |e 1 |h 9-12 |g 4 | ||
| author_variant |
d g dg |
|---|---|
| matchkey_str |
article:0168583X:2006----::nxfivsiainfreisalwmlnatvtoislcnfe |
| hierarchy_sort_str |
2006 |
| publishDate |
2006 |
| allfields |
sw061214 (DE-627)OLC1754902316 (DE-599)GBVOLC1754902316 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Giubertoni, D. verfasserin aut An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Pepponi, G. oth Bersani, M. oth Gennaro, S. oth D’Acapito, F. oth Doherty, R. oth Foad, M.A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 253(2006), 1, Seite 9-12 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:253 year:2006 number:1 pages:9-12 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_21 GBV_ILN_31 GBV_ILN_70 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_4266 GBV_ILN_4307 UA 5680. AR 253 2006 1 9-12 4 |
| spelling |
sw061214 (DE-627)OLC1754902316 (DE-599)GBVOLC1754902316 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Giubertoni, D. verfasserin aut An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Pepponi, G. oth Bersani, M. oth Gennaro, S. oth D’Acapito, F. oth Doherty, R. oth Foad, M.A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 253(2006), 1, Seite 9-12 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:253 year:2006 number:1 pages:9-12 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_21 GBV_ILN_31 GBV_ILN_70 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_4266 GBV_ILN_4307 UA 5680. AR 253 2006 1 9-12 4 |
| allfields_unstemmed |
sw061214 (DE-627)OLC1754902316 (DE-599)GBVOLC1754902316 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Giubertoni, D. verfasserin aut An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Pepponi, G. oth Bersani, M. oth Gennaro, S. oth D’Acapito, F. oth Doherty, R. oth Foad, M.A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 253(2006), 1, Seite 9-12 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:253 year:2006 number:1 pages:9-12 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_21 GBV_ILN_31 GBV_ILN_70 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_4266 GBV_ILN_4307 UA 5680. AR 253 2006 1 9-12 4 |
| allfieldsGer |
sw061214 (DE-627)OLC1754902316 (DE-599)GBVOLC1754902316 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Giubertoni, D. verfasserin aut An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Pepponi, G. oth Bersani, M. oth Gennaro, S. oth D’Acapito, F. oth Doherty, R. oth Foad, M.A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 253(2006), 1, Seite 9-12 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:253 year:2006 number:1 pages:9-12 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_21 GBV_ILN_31 GBV_ILN_70 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_4266 GBV_ILN_4307 UA 5680. AR 253 2006 1 9-12 4 |
| allfieldsSound |
sw061214 (DE-627)OLC1754902316 (DE-599)GBVOLC1754902316 DE-627 ger DE-627 rakwb 530 UA 5680. AVZ rvk Giubertoni, D. verfasserin aut An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing 2006 4 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier Pepponi, G. oth Bersani, M. oth Gennaro, S. oth D’Acapito, F. oth Doherty, R. oth Foad, M.A. oth Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Amsterdam [u.a.] : Elsevier, 1984 253(2006), 1, Seite 9-12 (DE-627)129862266 (DE-600)283666-X (DE-576)015173690 0168-583X nnns volume:253 year:2006 number:1 pages:9-12 extent:4 GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_21 GBV_ILN_31 GBV_ILN_70 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_4266 GBV_ILN_4307 UA 5680. AR 253 2006 1 9-12 4 |
| source |
Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 253(2006), 1, Seite 9-12 volume:253 year:2006 number:1 pages:9-12 extent:4 |
| sourceStr |
Enthalten in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms 253(2006), 1, Seite 9-12 volume:253 year:2006 number:1 pages:9-12 extent:4 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| dewey-raw |
530 |
| isfreeaccess_bool |
false |
| container_title |
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| authorswithroles_txt_mv |
Giubertoni, D. @@aut@@ Pepponi, G. @@oth@@ Bersani, M. @@oth@@ Gennaro, S. @@oth@@ D’Acapito, F. @@oth@@ Doherty, R. @@oth@@ Foad, M.A. @@oth@@ |
| publishDateDaySort_date |
2006-01-01T00:00:00Z |
| hierarchy_top_id |
129862266 |
| dewey-sort |
3530 |
| id |
OLC1754902316 |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1754902316</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230710000327.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">061214s2006 xx ||||| 00| ||und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">sw061214</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1754902316</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1754902316</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 5680.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Giubertoni, D.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="3"><subfield code="a">An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2006</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">4</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Pepponi, G.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bersani, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gennaro, S.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">D’Acapito, F.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Doherty, R.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Foad, M.A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</subfield><subfield code="d">Amsterdam [u.a.] : Elsevier, 1984</subfield><subfield code="g">253(2006), 1, Seite 9-12</subfield><subfield code="w">(DE-627)129862266</subfield><subfield code="w">(DE-600)283666-X</subfield><subfield code="w">(DE-576)015173690</subfield><subfield code="x">0168-583X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:253</subfield><subfield code="g">year:2006</subfield><subfield code="g">number:1</subfield><subfield code="g">pages:9-12</subfield><subfield code="g">extent:4</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 5680.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">253</subfield><subfield code="j">2006</subfield><subfield code="e">1</subfield><subfield code="h">9-12</subfield><subfield code="g">4</subfield></datafield></record></collection>
|
| author |
Giubertoni, D. |
| spellingShingle |
Giubertoni, D. ddc 530 rvk UA 5680. An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| authorStr |
Giubertoni, D. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)129862266 |
| format |
Article |
| dewey-ones |
530 - Physics |
| delete_txt_mv |
keep |
| author_role |
aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0168-583X |
| topic_title |
530 UA 5680. AVZ rvk An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| topic |
ddc 530 rvk UA 5680. |
| topic_unstemmed |
ddc 530 rvk UA 5680. |
| topic_browse |
ddc 530 rvk UA 5680. |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| author2_variant |
g p gp m b mb s g sg f d fd r d rd m f mf |
| hierarchy_parent_title |
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| hierarchy_parent_id |
129862266 |
| dewey-tens |
530 - Physics |
| hierarchy_top_title |
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)129862266 (DE-600)283666-X (DE-576)015173690 |
| title |
An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| ctrlnum |
(DE-627)OLC1754902316 (DE-599)GBVOLC1754902316 |
| title_full |
An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| author_sort |
Giubertoni, D. |
| journal |
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| journalStr |
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| isOA_bool |
false |
| dewey-hundreds |
500 - Science |
| recordtype |
marc |
| publishDateSort |
2006 |
| contenttype_str_mv |
txt |
| container_start_page |
9 |
| author_browse |
Giubertoni, D. |
| container_volume |
253 |
| physical |
4 |
| class |
530 UA 5680. AVZ rvk |
| format_se |
Aufsätze |
| author-letter |
Giubertoni, D. |
| dewey-full |
530 |
| title_sort |
exafs investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| title_auth |
An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_21 GBV_ILN_31 GBV_ILN_70 GBV_ILN_170 GBV_ILN_2006 GBV_ILN_2014 GBV_ILN_4266 GBV_ILN_4307 |
| container_issue |
1 |
| title_short |
An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing |
| remote_bool |
false |
| author2 |
Pepponi, G. Bersani, M. Gennaro, S. D’Acapito, F. Doherty, R. Foad, M.A. |
| author2Str |
Pepponi, G. Bersani, M. Gennaro, S. D’Acapito, F. Doherty, R. Foad, M.A. |
| ppnlink |
129862266 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| author2_role |
oth oth oth oth oth oth |
| up_date |
2024-07-03T20:11:56.179Z |
| _version_ |
1803590058567008257 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC1754902316</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230710000327.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">061214s2006 xx ||||| 00| ||und c</controlfield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">sw061214</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC1754902316</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBVOLC1754902316</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 5680.</subfield><subfield code="q">AVZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Giubertoni, D.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="3"><subfield code="a">An EXAFS investigation of arsenic shallow implant activation in silicon after laser sub-melt annealing</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2006</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">4</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Pepponi, G.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bersani, M.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gennaro, S.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">D’Acapito, F.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Doherty, R.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Foad, M.A.</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</subfield><subfield code="d">Amsterdam [u.a.] : Elsevier, 1984</subfield><subfield code="g">253(2006), 1, Seite 9-12</subfield><subfield code="w">(DE-627)129862266</subfield><subfield code="w">(DE-600)283666-X</subfield><subfield code="w">(DE-576)015173690</subfield><subfield code="x">0168-583X</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:253</subfield><subfield code="g">year:2006</subfield><subfield code="g">number:1</subfield><subfield code="g">pages:9-12</subfield><subfield code="g">extent:4</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_11</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2006</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2014</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 5680.</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">253</subfield><subfield code="j">2006</subfield><subfield code="e">1</subfield><subfield code="h">9-12</subfield><subfield code="g">4</subfield></datafield></record></collection>
|
| score |
7.401639 |