3D macroporous structures for the development of high capacitance silicon integrated microcapacitors
Autor*in: |
Sancho, A. [verfasserIn] |
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Format: |
Artikel |
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Erschienen: |
2007 |
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Umfang: |
4 |
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Übergeordnetes Werk: |
Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 84(2007), 5, Seite 1308-1311 |
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Übergeordnetes Werk: |
volume:84 ; year:2007 ; number:5 ; pages:1308-1311 ; extent:4 |
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