3D macroporous structures for the development of high capacitance silicon integrated microcapacitors

Gespeichert in:

Autor*in:	Sancho, A. [verfasserIn] Etxeberria, Jon A. Gracia, F.J.

Format:	Artikel

Erschienen:	2007

Umfang:	4

Übergeordnetes Werk:	Enthalten in: Microelectronic engineering - Amsterdam [u.a.] : Elsevier, 1983, 84(2007), 5, Seite 1308-1311
Übergeordnetes Werk:	volume:84 ; year:2007 ; number:5 ; pages:1308-1311 ; extent:4

Katalog-ID:	OLC1768702454

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