Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch

Gespeichert in:

Autor*in:	Guo, Z.J. [verfasserIn] Mcgruer, N.E. Adams, G.G.

Format:	Artikel

Erschienen:	2007

Umfang:	11

Übergeordnetes Werk:	Enthalten in: Journal of micromechanics and microengineering - Bristol : IOP Publ., 1991, 17(2007), 9, Seite 1899-1909
Übergeordnetes Werk:	volume:17 ; year:2007 ; number:9 ; pages:1899-1909 ; extent:11

Katalog-ID:	OLC1777810043

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